High Quality-Factor and Spectrum-Clean AlN Lamb-Wave Resonators with Optimized Lateral Reflection Boundary Conditions and Transducer Design
Sun, Haiyan, Lv, Shitao, Zhang, Aoyu, Song, Chenguang, Sun, Xinyi, Tan, Fazeng, Liang, Liuhong, Zhu, Yinfang, Zhao, Jicong
Published in Micromachines (Basel) (15.05.2022)
Published in Micromachines (Basel) (15.05.2022)
Get full text
Journal Article
Characterization analysis of quality factor, electro-mechanical coupling and spurious modes for AlN Lamb-wave resonators with f > 2 GHz
Lv, Shitao, Zhu, Zheng, Long, Fei, Sun, Haiyan, Song, Chenguang, Zhang, Aoyu, Tan, Fazeng, Zhao, Jicong
Published in Microelectronics (01.07.2022)
Published in Microelectronics (01.07.2022)
Get full text
Journal Article
Characterization analysis of quality factor, electro-mechanical coupling and spurious modes for AlN Lamb-wave resonators with fs> 2 GHz
Lv, Shitao, Zhu, Zheng, Long, Fei, Sun, Haiyan, Song, Chenguang, Zhang, Aoyu, Tan, Fazeng, Zhao, Jicong
Published in Microelectronics (01.07.2022)
Published in Microelectronics (01.07.2022)
Get full text
Journal Article
Surface acoustic wave resonator
LI HUALIN, MA JINYI, TAN FAZENG, DONG JIAHE, CHEN YEN-KUANG, CHEN ZHENGLIN
Year of Publication 23.09.2022
Get full text
Year of Publication 23.09.2022
Patent
Method for inhibiting transverse energy leakage of surface acoustic wave device
HU CHENGJI, MA JINYI, ZHENG ZEYU, PAN HONGZHI, TAN FAZENG, DU XUESONG, DONG JIAHE, LU CHUAN, XIAO QIANG, CHEN ZHENGLIN
Year of Publication 08.08.2023
Get full text
Year of Publication 08.08.2023
Patent
Surface acoustic wave device with transverse clutter suppression function
ZHAN XUEKUI, PAN HONGZHI, MA JINYI, TAN FAZENG, DU XUESONG, HE YI, LENG JUNLIN, DONG JIAHE, CHEN ZHENGLIN, XIAO QIANG
Year of Publication 18.07.2023
Get full text
Year of Publication 18.07.2023
Patent
Structure for suppressing transverse mode of surface acoustic wave device
MA JINYI, ZHENG ZEYU, PAN HONGZHI, LI HUALIN, TAN FAZENG, DU XUESONG, DONG JIAHE, LU CHUAN, XIAO QIANG, CHEN ZHENGLIN
Year of Publication 18.07.2023
Get full text
Year of Publication 18.07.2023
Patent
Transverse clutter mode suppression structure of SAW (Surface Acoustic Wave) device
ZHANG LING, HU MINGLANG, ZHU YANNI, JIN QIAO, LUO HONGFEI, TAN FAZENG, LUO WENTING, DU XUESONG, DONG JIAHE, CHEN ZHENGLIN, XIAO QIANG
Year of Publication 18.07.2023
Get full text
Year of Publication 18.07.2023
Patent
Thin-film bulk acoustic wave device packaging structure and packaging method thereof
XU YANG, LIANG LIUHONG, JIANG PINGYING, MA JINYI, TIAN BENLANG, LIU YA, ZHANG BIZHUANG, TAN FAZENG, LONG FEI
Year of Publication 18.08.2020
Get full text
Year of Publication 18.08.2020
Patent
Film layer structure, manufacturing method thereof and filter comprising film layer structure
XU YANG, LIANG LIUHONG, JIANG PINGYING, MA JINYI, TIAN BENLANG, TANG XIAOLONG, LIU YA, TAN FAZENG, YANG ZHENGBING, LAN WEIHAO
Year of Publication 15.11.2019
Get full text
Year of Publication 15.11.2019
Patent
Wafer-level packaging method and structure of film bulk acoustic wave filter
JIANG PINGYING, TANG XIAOLONG, LIU YA, SUN KE, GUO RONGDI, TAN FAZENG, JIANG XIAONA, XU YANG, MA JINYI, TIAN BENLANG, YANG ZHENGBING, LAN ZHONGWEN, WU CHUANJIAN, YU ZHONG
Year of Publication 24.01.2020
Get full text
Year of Publication 24.01.2020
Patent
Surface acoustic wave filter device wafer level packaging method and structure thereof
JIANG PINGYING, LIU YA, SUN KE, GUO RONGDI, TAN FAZENG, JIANG XIAONA, DU XUESONG, XU YANG, MA JINYI, TIAN BENLANG, YANG ZHENGBING, LAN ZHONGWEN, WU CHUANJIAN, YU ZHONG
Year of Publication 03.01.2020
Get full text
Year of Publication 03.01.2020
Patent