COPOLYMER FOR SEMICONDUCTOR LITHOGRAPHY AND PROCESS FOR PRODUCTION THEREOF
OIKAWA TOMO, TAKESHITA YUU, MUROI MASAAKI, ATSUJI KOUTA, YAMADA MASAKAZU, SAISHO KENSUKE, YAMAGISHI TAKANORI, NAKAMURA TAKAHIRO
Year of Publication 15.11.2006
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Year of Publication 15.11.2006
Patent