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Year of Publication 23.08.1999
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Year of Publication 16.10.2004
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Year of Publication 22.10.1996
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Year of Publication 30.04.1996
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Method of plasma chemical vapor deposition of layer with improved interface
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Year of Publication 03.01.1996
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Year of Publication 03.01.1996
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Multi-step chemical vapor deposition method for thin film transistors
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Year of Publication 15.08.1995
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Year of Publication 15.08.1995
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Year of Publication 02.06.1995
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Year of Publication 02.06.1995
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Method of plasma chemical vapor deposition of layer with improved interface
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Year of Publication 28.12.1994
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Year of Publication 28.12.1994
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Year of Publication 16.03.2005
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Verfahren zur plasmaunterstützten chemischen Abscheidung von Schichten aus der Dampfphase unter Verbesserung der Zwischenflächen
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Year of Publication 10.08.2000
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Year of Publication 10.08.2000
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