MULTI-STEP CVD METHOD FOR THIN FILM TRANSISTOR
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Year of Publication 10.06.2004
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Method of annealing large area glass substrates
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Year of Publication 21.03.2002
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Year of Publication 21.03.2002
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GAS REACTION TO ELIMINATE CONTAMINANT IN CVD CHAMBER
LAW KAM, SHANG QUANYUAN, ROBERTSON ROBERT, KOLLRACK MIKE, FENG JEFF, LEE ANGELA, TAKEHARA TAKAKO
Year of Publication 28.02.2002
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Year of Publication 28.02.2002
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CONDITIONED CHAMBER FOR IMPROVING CHEMICAL VAPOR DEPOSITION
LAW KAM, SHANG QUANYUAN, ROBERTSON ROBERT, KOLLRACK MIKE, FENG JEFF, LEE ANGELA, TAKEHARA TAKAKO
Year of Publication 28.02.2002
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Year of Publication 28.02.2002
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METHOD FOR IMPROVING CHEMICAL VAPOR DEPOSITION PROCESSING
LAW KAM, SHANG QUANYUAN, ROBERTSON ROBERT, KOLLRACK MIKE, FENG JEFF, LEE ANGELA, TAKEHARA TAKAKO
Year of Publication 28.02.2002
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Year of Publication 28.02.2002
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DEPOSITION OF TEOS OXIDE USING PULSE RF PLASMA
GOTO HARUHIRO H, CARL A SORENSEN, LAW KAM S, WILLIAM R HIRSCHBERGER, TAKEHARA TAKAKO
Year of Publication 28.02.2002
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Year of Publication 28.02.2002
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Method of annealing large area glass substrates
Takehara, Takako, Tsai, Chuang-Chuang, Qiu, Regina, LeGrice, Yvonne, Harshbarger, William, Robertson, Robert
Year of Publication 14.02.2002
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Year of Publication 14.02.2002
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Method of annealing large area glass substrates
TSAI CHUANGUANG, QIU REGINA, HARSHBARGER WILLIAM REID, LEGRICE YVONNE, ROBERTSON ROBERT MCCORMICK, TAKEHARA TAKAKO
Year of Publication 14.02.2002
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Year of Publication 14.02.2002
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LOW TEMPERATURE PROCESS FOR TFT FABRICATION
YIM, DONG KIL, KIM, WOONG KWON, HARSHBARGER WILLIAM R, SHANG QUANYUAN, HSIAO MARK, CHANG, YOU GYUNG, YUN, DUK CHUL, TAKEHARA TAKAKO
Year of Publication 16.02.2006
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Year of Publication 16.02.2006
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Method of conditioning a chamber for chemical vapor deposition
KOLLRACK, MIKE, LEE, ANGELA, LAW, KAM, TAKEHARA, TAKAKO, FENG, JEFF, SHANG, QUANYUAN, ROBERTSON, ROBERT
Year of Publication 14.11.2001
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Year of Publication 14.11.2001
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Gas reactions to eliminate contaminates in a CVD chamber
KOLLRACK, MIKE, LEE, ANGELA, LAW, KAM, TAKEHARA, TAKAKO, FENG, JEFF, SHANG, QUANYUAN, ROBERTSON, ROBERT
Year of Publication 14.11.2001
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Year of Publication 14.11.2001
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Methods for improving chemical vapor deposition processing
KOLLRACK, MIKE, LEE, ANGELA, LAW, KAM, TAKEHARA, TAKAKO, FENG, JEFF, SHANG, QUANYUAN, ROBERTSON, ROBERT
Year of Publication 14.11.2001
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Year of Publication 14.11.2001
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Method of annealing large area glass substrates
TSAI CHUANGUANG, QIU REGINA, HARSHBARGER WILLIAM REID, LEGRICE YVONNE, ROBERTSON ROBERT MCCORMICK, TAKEHARA TAKAKO
Year of Publication 25.09.2001
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Year of Publication 25.09.2001
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Annealing an amorphous film using microwave energy
WON TAEKYUNG, SUN SHENG, SHANG QUANYUAN, LAW KAM S, ROBERTSON ROBERT MCCORMICK, TAKEHARA TAKAKO
Year of Publication 09.01.2001
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Year of Publication 09.01.2001
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METHOD FOR ANNEALING AN AMORPHOUS FILM USING MICROWAVE ENERGY
ROBERTSON, ROBERT, MCCORMICK, WON, TAEKYUNG, LAW, KAM, S, TAKEHARA, TAKAKO, SHANG, QUANYUAN, SUN, SHENG
Year of Publication 11.10.2000
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Year of Publication 11.10.2000
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Method of depositing amorphous silicon based films having controlled conductivity
LAW KAM, QIU REGINA, HARSHBARGER WILLIAM R, OLSEN JEFF C, LEGRICE YVONNE, FENG GUOFU J, ROBERTSON ROBERT M, TAKEHARA TAKAKO
Year of Publication 22.08.2002
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Year of Publication 22.08.2002
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METHOD OF COATING AND ANNEALING LARGE AREA GLASS SUBSTRATES
HARSHBARGER, WILLIAM, REID, TSAI, CHUANGUANG, QIU, REGINA, LEGRICE, YVONNE, ROBERTSON, ROBERT, MCCORMICK, TAKEHARA, TAKAKO
Year of Publication 10.09.1999
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Year of Publication 10.09.1999
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Method of depositing amorphous silicon based films having controlled conductivity
LAW KAM, QIU REGINA, HARSHBARGER WILLIAM R, OLSEN JEFF C, LEGRICE YVONNE, FENG GUOFU J, ROBERTSON ROBERT M, TAKEHARA TAKAKO
Year of Publication 05.03.2002
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Year of Publication 05.03.2002
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Method of depositing amorphous silicon based films having controlled conductivity
Harshbarger, William R, Takehara, Takako, Olsen, Jeff C, Qiu, Regina, LeGrice, Yvonne, Feng, Guofu J, Robertson, Robert M, Law, Kam
Year of Publication 05.03.2002
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Year of Publication 05.03.2002
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METHOD FOR ANNEALING AN AMORPHOUS FILM USING MICROWAVE ENERGY
ROBERTSON, ROBERT, MCCORMICK, WON, TAEKYUNG, LAW, KAM, S, TAKEHARA, TAKAKO, SHANG, QUANYUAN, SUN, SHENG
Year of Publication 20.05.1999
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Year of Publication 20.05.1999
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