Formation of Al 2 O 3 Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique
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Published in ECS transactions (01.10.2010)
Published in ECS transactions (01.10.2010)
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Journal Article
METHOD FOR ATTACHING RADIO WAVE ABSORBER AND STRUCTURE FOR ATTACHING THE SAME
TAKAMATSU, TOSHIYUKI, SUZUE, MASAYOSHI, MORI, KAZUHIKO, HARA, HAZIME, NAGATA, HIROSHI, TAKAO, TOSHINORI
Year of Publication 19.08.1999
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Year of Publication 19.08.1999
Patent
METHOD FOR ATTACHING RADIO WAVE ABSORBER AND STRUCTURE FOR ATTACHING THE SAME
HAMAUZU, TAKASHI, TAKAMATSU, TOSHIYUKI, SUZUE, MASAYOSHI, MORI, KAZUHIKO, HARA, HAZIME, TANI, MASATO, NAGATA, HIROSHI, TAKAO, TOSHINORI
Year of Publication 19.08.1999
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Year of Publication 19.08.1999
Patent