Growth of CoSi2 films on Si(100) substrates by a two-step method
JI SHI, IRIE, Tetsuji, TAKAHASHI, Fumitoshi, HASHIMOTO, Mituru
Published in Thin solid films (31.10.2000)
Published in Thin solid films (31.10.2000)
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Conference Proceeding
Journal Article
Growth of CoSi 2 films on Si (100) substrates by a two-step method
Shi, Ji, Irie, Tetsuji, Takahashi, Fumitoshi, Hashimoto, Mituru
Published in Thin solid films (2000)
Published in Thin solid films (2000)
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Journal Article
Growth of CoSi sub(2) films on Si (100) substrates by a two-step method
Shi, Ji, Irie, Tetsuji, Takahashi, Fumitoshi, Hashimoto, Mituru
Published in Thin solid films (01.01.2000)
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Published in Thin solid films (01.01.2000)
Journal Article
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
TAKAHASHI, Fumitoshi, KUNIKIYO, Tatsuya, GOTO, Yotaro, SATO, Hidenori
Year of Publication 13.02.2019
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Year of Publication 13.02.2019
Patent