Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers
Isobe, Atsushi, Kamada, Yudai, Oshima, Takashi, Furubayashi, Yuki, Sakuma, Noriyuki, Takubo, Chisaki, Tainaka, Yasushi, Watanabe, Keiki, Sekiguchi, Tomonori
Published in 2018 IEEE SENSORS (01.10.2018)
Published in 2018 IEEE SENSORS (01.10.2018)
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Conference Proceeding
Impact of reducing STI-induced stress on layout dependence of MOSFET characteristics
Miyamoto, M., Ohta, H., Kumagai, Y., Sonobe, Y., Ishibashi, K., Tainaka, Y.
Published in IEEE transactions on electron devices (01.03.2004)
Published in IEEE transactions on electron devices (01.03.2004)
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Journal Article
A low-cost, 30 NG/VHZ noise floor MEMS accelerometers for large sensor network
Kamada, Yudai, Isobe, Atsushi, Oshima, Takashi, Furubayashi, Yuki, Sakuma, Noriyuki, Takubo, Chisaki, Tainaka, Yasushi, Watanabe, Keiki, Mori, Keijiro, Mori, Naoki, Kazama, Hideto, Matsumoto, Akira, Sekiguchi, Tomonori
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
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Conference Proceeding
Semiconductor device including active regions and gate electrodes for field effect transistors, with a trench formed between the active regions
Ohta, Hiroyuki, Kumagai, Yukihiro, Sonobe, Yasuo, Ishibashi, Kousuke, Tainaka, Yasushi, Miyamoto, Masafumi, Miura, Hideo
Year of Publication 17.04.2007
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Year of Publication 17.04.2007
Patent
Semiconductor device including active regions and gate electrodes for field effect transistors, with a trench formed between the active regions
TAINAKA YASUSHI, MIYAMOTO MASAFUMI, OHTA HIROYUKI, ISHIBASHI KOUSUKE, SONOBE YASUO, KUMAGAI YUKIHIRO, MIURA HIDEO
Year of Publication 17.04.2007
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Year of Publication 17.04.2007
Patent
SEMICONDUCTOR DEVICE
TAINAKA YASUSHI, OTA HIROYUKI, MIYAMOTO MASABUMI, SONOBE YASUO, ISHIBASHI KYOSUKE, KUMAGAI YUKIHIRO, MIURA HIDEO
Year of Publication 18.07.2003
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Year of Publication 18.07.2003
Patent
Semiconductor device
TAINAKA YASUSHI, MIYAMOTO MASAFUMI, OHTA HIROYUKI, ISHIBASHI KOUSUKE, SONOBE YASUO, KUMAGAI YUKIHIRO, MIURA HIDEO
Year of Publication 10.07.2003
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Year of Publication 10.07.2003
Patent
Semiconductor device
Kumagai, Yukihiro, Ohta, Hiroyuki, Sonobe, Yasuo, Ishibashi, Kousuke, Tainaka, Yasushi, Miyamoto, Masafumi, Miura, Hideo
Year of Publication 10.07.2003
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Year of Publication 10.07.2003
Patent