Using process experienced correlation table to improve the accuracy and reliability of data mining for yield improvement
Haw-Jyue Luo, Wang, S.R., Chen, C.C., Hung-En Tai, Chen-Fu Chien, Pei-Nong Chen
Published in 2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) (2004)
Published in 2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) (2004)
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