Heteroepitaxial growth of ε-Ga2O3 thin films on cubic (111) GGG substrates by mist chemical vapor deposition
Tahara, Daisuke, Nishinaka, Hiroyuki, Morimoto, Shota, Yoshimoto, Mashahiro
Published in 2017 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) (01.06.2017)
Published in 2017 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) (01.06.2017)
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