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Year of Publication 22.03.2022
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Year of Publication 17.03.2022
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Year of Publication 14.02.2023
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Sensor assembly for chamber condition monitoring
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Year of Publication 01.07.2024
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Sensor assembly for chamber condition monitoring
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Year of Publication 21.02.2024
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Year of Publication 21.02.2024
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Year of Publication 10.09.2021
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Year of Publication 10.09.2021
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CAPACITIVE SENSOR FOR CHAMBER CONDITION MONITORING
Saly, Mark Joseph, Tae, Patrick John, Sun, Jennifer, Li, Xiaopu, Pan, Yaoling, Tedeschi, Leonard, Willwerth, Michael D, Hicks, III, Albert Barrett, Bera, Kallol, McCormick, Daniel Thomas, Kraus, Philip Allan, Enman, Lisa J
Year of Publication 09.09.2021
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Year of Publication 09.09.2021
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Year of Publication 29.10.2020
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Year of Publication 29.10.2020
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SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
KOOSAU, Denis M, LEE, Changhun, DHINDSA, Rajinder, WILLWERTH, Michael D, BYUN, Daniel Sang, CRIMINALE, Phillip A, TAE, Patrick John, KRAUS, Philip Allan, PAN, Yaoling, TEDESCHI, Leonard M, SCHMID, Andreas
Year of Publication 22.10.2020
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Year of Publication 22.10.2020
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RESONANT PROCESS MONITOR
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Year of Publication 19.09.2019
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Plasma chamber monitoring system of capacitive sensing data integration for plasma chamber condition monitoring
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Year of Publication 16.01.2024
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Year of Publication 16.01.2024
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Plasma chamber monitoring system of capacitive sensing data integration for plasma chamber condition monitoring
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Year of Publication 21.10.2023
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Year of Publication 21.10.2023
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