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Year of Publication 26.09.2024
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Year of Publication 27.10.2022
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Year of Publication 24.07.2024
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Year of Publication 16.08.2022
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Year of Publication 26.10.2023
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Year of Publication 22.08.2023
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Year of Publication 22.08.2023
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Year of Publication 26.07.2023
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Year of Publication 26.07.2023
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Sensors and system for in-situ edge ring erosion monitor
Tae, Patrick John, Tedeschi, Leonard M, Pan, Yaoling, Willwerth, Michael D, Byun, Daniel Sang, Koosau, Denis M, Criminale, Phillip A, Lee, Changhun, Kraus, Philip Allan, Dhindsa, Rajinder, Schmid, Andreas
Year of Publication 11.06.2024
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Year of Publication 11.06.2024
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CAPACITIVE SENSOR HOUSING FOR CHAMBER CONDITION MONITORING
Tae, Patrick John, Pan, Yaoling, Tedeschi, Leonard, Willwerth, Michael D, McCormick, Daniel Thomas
Year of Publication 09.09.2021
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Year of Publication 09.09.2021
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SMART CAMERA SUBSTRATE
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Year of Publication 30.03.2023
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Year of Publication 30.03.2023
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KRAUS, Philip, TAE, Patrick, NARA, Shivaraj Manjunath, ERICKSON, Blake, PARAMESHWARAPPA, Anandakumar, KUMAR, Dhirendra, UMMETHALA, Upendra, NAGARAJAN, Sivasankar, BERDING, Keith
Year of Publication 24.03.2022
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Year of Publication 24.03.2022
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Resonant process monitor
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Year of Publication 10.01.2023
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Year of Publication 10.01.2023
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Year of Publication 25.08.2022
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Year of Publication 25.08.2022
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