플라즈마 챔버 상태 모니터링을 위한 용량성 센서들 및 용량성 감지 위치들
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Year of Publication 25.10.2022
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Year of Publication 25.10.2022
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Year of Publication 24.10.2022
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Year of Publication 24.10.2022
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플라즈마 챔버 상태 모니터링을 위한 용량성 감지 데이터 통합
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Year of Publication 08.11.2022
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Year of Publication 08.11.2022
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챔버 상태 모니터링을 위한 용량성 센서
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Year of Publication 26.10.2022
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Year of Publication 26.10.2022
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RESONANT PROCESS MONITOR
LU CHIH SHUN, TAE PATRICK JOHN, CHAN KELVIN, KRITHIVASAN VIJAYKUMAR, WILLWERTH MICHAEL D, PAN YAOLING, KRAUS PHILIP ALLAN, MAO SHIMIN, SUBRAMANI ANANTHA, GOEL ASHISH, TEDESCHI LEONARD
Year of Publication 27.09.2019
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Year of Publication 27.09.2019
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CAPACITIVE SENSOR HOUSING FOR CHAMBER CONDITION MONITORING
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Year of Publication 27.10.2022
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Year of Publication 27.10.2022
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Capacitive sensor housing for chamber condition monitoring
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Year of Publication 16.08.2022
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Year of Publication 16.08.2022
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Year of Publication 11.06.2024
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Year of Publication 11.06.2024
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CAPACITIVE SENSOR HOUSING FOR CHAMBER CONDITION MONITORING
Tae, Patrick John, Pan, Yaoling, Tedeschi, Leonard, Willwerth, Michael D, McCormick, Daniel Thomas
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Year of Publication 09.09.2021
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Year of Publication 10.01.2023
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Year of Publication 14.02.2023
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Year of Publication 14.02.2023
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Sensor assembly for chamber condition monitoring
PAN, YAOLING, TEDESCHI, LEONARD, TAE, PATRICK JOHN, WILLWERTH, MICHAEL D, MCCORMICK, DANIEL THOMAS
Year of Publication 21.02.2024
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Year of Publication 21.02.2024
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CAPACITIVE SENSOR FOR CHAMBER CONDITION MONITORING
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Year of Publication 10.09.2021
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Year of Publication 10.09.2021
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CAPACITIVE SENSOR FOR CHAMBER CONDITION MONITORING
Saly, Mark Joseph, Tae, Patrick John, Sun, Jennifer, Li, Xiaopu, Pan, Yaoling, Tedeschi, Leonard, Willwerth, Michael D, Hicks, III, Albert Barrett, Bera, Kallol, McCormick, Daniel Thomas, Kraus, Philip Allan, Enman, Lisa J
Year of Publication 09.09.2021
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Year of Publication 09.09.2021
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SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
KOOSAU, Denis M, LEE, Changhun, DHINDSA, Rajinder, WILLWERTH, Michael D, BYUN, Daniel Sang, CRIMINALE, Phillip A, TAE, Patrick John, KRAUS, Philip Allan, PAN, Yaoling, TEDESCHI, Leonard M, SCHMID, Andreas
Year of Publication 29.10.2020
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Year of Publication 29.10.2020
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