by Tada, Shigekazu, Ito, Masafumi, Hamagaki, Manabu, Hori, Masaru, Goto, Toshio
Published in Japanese Journal of Applied Physics (2002)

by Tada, Shigekazu, Takashima, Seigou, Ito, Masafumi, Hamagaki, Manabu, Hori, Masaru, Goto, Toshio
Published in Japanese Journal of Applied Physics (2002)

by Tada, Shigekazu, Ito, Masafumi, Hamagaki, Manabu, Hori, Masaru, Goto, Toshio
Published in Japanese Journal of Applied Physics (2002)

by ASANO, TSUYOSHI, TADA, SHIGEKAZU, AKIYAMA, SHIGERU, NAKAGAWA, TATSUYA, MIYAMOTO, YOSHIHIRO
Year of Publication 14.05.2015

by TADA, SHIGEKAZU, SAKAMOTO, YUICHI, NAKAYA, MASAKI, KAGE, TSUYOSHI, TAKEMOTO, KEISHU, OIKAWA, MASAHISA, KAWABE, TAKEHARU
Year of Publication 10.04.2008

by ASANO TSUYOSHI, MIYAMOTO YOSHIHIRO, NAKAGAWA TATSUYA, AKIYAMA SHIGERU, TADA SHIGEKAZU
Year of Publication 29.04.2015

by Tada, Shigekazu, Miyazawa, Wataru, Sakamoto, Yuichi, Den, Shoji, Hayashi, Yuzo
Published in Thin solid films (01.08.1996)

by NAKATANI MASAKI, TADA SHIGEKAZU
Year of Publication 22.06.2006

by Miyazawa, Wataru, Tada, Shigekazu, Ito, Kohichi, Saito, Hironori, Den, Shoji, Hayashi, Yuzo, Okamoto, Yukio, Sakamoto, Yuichi
Published in Plasma sources science & technology (01.05.1996)

by HAMAGAKI MANABU, TADA SHIGEKAZU
Year of Publication 28.01.2000

by SAKAMOTO JUICHI, TADA SHIGEKAZU
Year of Publication 31.03.1999

by SAKAMOTO YUICHI, TADA SHIGEKAZU
Year of Publication 29.05.1998

by ASANO, TSUYOSHI, TADA, SHIGEKAZU, AKIYAMA, SHIGERU, NAKAGAWA, TATSUYA, MIYAMOTO, YOSHIHIRO
Year of Publication 01.12.2015

by ASANO, TSUYOSHI, TADA, SHIGEKAZU, AKIYAMA, SHIGERU, NAKAGAWA, TATSUYA, MIYAMOTO, YOSHIHIRO
Year of Publication 01.09.2015

by TAKAHASHI HIDEAKI, TADA SHIGEKAZU, TAKEMOTO YOSHIHIDE, KAGE TAKESHI
Year of Publication 23.06.2005

by NAKATANI MASAKI, SAKAMOTO YUICHI, KAWABE TAKEHARU, OIKAWA AKIHISA, TADA SHIGEKAZU, TAKEMOTO YOSHIHIDE, KAGE TAKESHI
Year of Publication 17.04.2008

by NAKATANI MASAKI, SAKAMOTO YUICHI, KAWABE TAKEHARU, OIKAWA AKIHISA, TADA SHIGEKAZU, TAKEMOTO YOSHIHIDE, KAGE TAKESHI
Year of Publication 17.04.2008

by SAKAMOTO YUICHI, HAMAGAKI MANABU, TADA SHIGEKAZU
Year of Publication 23.06.2000

by SAKAMOTO YUICHI, HAMAGAKI MANABU, TADA SHIGEKAZU
Year of Publication 21.03.2000

by SAKAMOTO JUICHI, TADA SHIGEKAZU, SUZUKI MITSUHIRO
Year of Publication 26.07.1999