Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma
Sugawara, Takuya, Matsuyama, Seiji, Sasaki, Masaru, Nakanishi, Toshio, Murakawa, Shigemi, Katsuki, Jiro, Ozaki, Shigenori, Tada, Yoshihide, Ohta, Tomohiro, Yamamoto, Nobuhiko
Published in Japanese Journal of Applied Physics (01.03.2005)
Published in Japanese Journal of Applied Physics (01.03.2005)
Get full text
Journal Article
METHOD FOR FORMING INSULATING FILM AND DEVICE THEREFOR
TADA YOSHIHIDE, NAKAMURA KENJI, SUEMURA ASAMI, IMAI MASAYUKI, HISHIYA SHINGO
Year of Publication 16.04.2001
Get full text
Year of Publication 16.04.2001
Patent
METHOD OF FORMING FILM AND FILM FORMING APPARATUS
YAMASAKI, HIDEAKI, NAKAMURA, KAZUHITO, ARIMA, SUSUMU, MATSUZAWA, KOUMEI, TADA, YOSHIHIDE, KAWANO, YUMIKO
Year of Publication 22.01.2004
Get full text
Year of Publication 22.01.2004
Patent
METHOD FOR FORMING INSULATION FILM
NAKANISHI, TOSHIO, OZAKI, SHIGENORI, MATSUYAMA, SEIJI, TADA, YOSHIHIDE, SASAKI, MASARU, SUGAWARA, TAKUYA, NAKAMURA, GENJI
Year of Publication 09.10.2003
Get full text
Year of Publication 09.10.2003
Patent
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
IMAI, MASAYUKI, YONEKAWA, TSUKASA, NAKAJIMA, ANRI, TADA, YOSHIHIDE, YOKOYAMA, SHIN, NAKAMURA, GENJI
Year of Publication 12.12.2002
Get full text
Year of Publication 12.12.2002
Patent
METHOD FOR MODIFYING INSULATING FILM
NAKAJIMA, SHIGERU, NAKANISHI, TOSHIO, FUJIWARA, TOMONORI, OZAKI, SHIGENORI, MATSUYAMA, SEIJI, TADA, YOSHIHIDE, SASAKI, MASARU, SUGAWARA, TAKUYA, HASEBE, KAZUHIDE, NAKAMURA, GENJI
Year of Publication 09.12.2004
Get full text
Year of Publication 09.12.2004
Patent
METHOD OF PRODUCING ELECTRONIC DEVICE MATERIAL
NAKANISHI, TOSHIO, OZAKI, SHIGENORI, MURAKAWA, SHIGEMI, MATSUYAMA, SEIJI, TADA, YOSHIHIDE, SUGAWARA, TAKUYA
Year of Publication 01.08.2002
Get full text
Year of Publication 01.08.2002
Patent
METHOD FOR PRODUCING MATERIAL OF ELECTRONIC DEVICE
NAKANISHI, TOSHIO, OZAKI, SHIGENORI, MURAKAWA, SHIGEMI, MATSUYAMA, SEIJI, TADA, YOSHIHIDE, SUGAWARA, TAKUYA
Year of Publication 25.07.2002
Get full text
Year of Publication 25.07.2002
Patent
METHOD FOR FORMING UNDERLYING INSULATION FILM
NAKAJIMA, SHIGERU, NAKANISHI, TOSHIO, FUJIWARA, TOMONORI, OZAKI, SHIGENORI, MATSUYAMA, SEIJI, TADA, YOSHIHIDE, SASAKI, MASARU, SUGAWARA, TAKUYA, HASEBE, KAZUHIDE, NAKAMURA, GENJI
Year of Publication 23.10.2003
Get full text
Year of Publication 23.10.2003
Patent