Selbstjustiertes Damaszener-Gate
YANG, CHIH-YUH, AHMED, SHIBLY S, KRIVOKAPIC, ZORAN, YU, BIN, WANG, HAIHONG, BUYNOSKI, MATTHEW, TABERY, CYRUS E, DAKSHINA-MURPHY, SRIKANTESWARA
Year of Publication 14.12.2006
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Year of Publication 14.12.2006
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SELF ALIGNED DAMASCENE GATE
YANG CHIH YUH, BUYNOSKI MATTHEW S, WANG HAIHONG, YU BIN, AHMED SHIBLY S, DAKSHINA MURPHY SRIKANTESWARA, TABERY CYRUS E, KRIVOKAPIC ZORAN
Year of Publication 18.10.2006
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Year of Publication 18.10.2006
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Self aligned damascene gate
HAIHONG WANG, CYRUS E TABERY, BIN YU, CHIH-YUH YANG, MATTHEW S BUYNOSKI, SRIKANTESWARA DAKSHINA-MURPHY, SHIBLY S AHMED, ZORAN KRIVOKAPIC
Year of Publication 27.09.2006
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Year of Publication 27.09.2006
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Model based metal overetch control
Phan, Khoi A, Rangarajan, Bharath, Lyons, Christopher F, Avanzino, Steven C, Subramanian, Ramkumar, Singh, Bhanwar, Tabery, Cyrus E
Year of Publication 26.10.2004
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Year of Publication 26.10.2004
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Model based metal overetch control
PHAN KHOI A, LYONS CHRISTOPHER F, AVANZINO STEVEN C, SINGH BHANWAR, RANGARAJAN BHARATH, SUBRAMANIAN RAMKUMAR, TABERY CYRUS E
Year of Publication 26.10.2004
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Year of Publication 26.10.2004
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Method for forming a fin in a finFET device
WANG HAIHONG, YU BIN, AHMED SHIBLY S, YANG CHIH-YUH, TABERY CYRUS E, DAKSHINA-MURTHY SRIKANTESWARA
Year of Publication 07.09.2004
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Year of Publication 07.09.2004
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LOW-TEMPERATURE POST-DOPANT ACTIVATION PROCESS
PATON, ERIC, N, YU, BIN, TABERY, CYRUS, E, XIANG, QI, OGLE, ROBERT, B
Year of Publication 11.08.2004
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Year of Publication 11.08.2004
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Scatterometry of grating structures to monitor wafer stress
PHAN KHOI A, LYONS CHRISTOPHER F, SINGH BHANWAR, AVANZINO STEVEN C, RANGARAJAN BHARATH, SUBRAMANIAN RAMKUMAR, TABERY CYRUS E
Year of Publication 03.08.2004
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Year of Publication 03.08.2004
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Scatterometry of grating structures to monitor wafer stress
Lyons, Christopher F, Singh, Bhanwar, Avanzino, Steven C, Phan, Khoi A, Rangarajan, Bharath, Subramanian, Ramkumar, Tabery, Cyrus E
Year of Publication 03.08.2004
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Year of Publication 03.08.2004
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DOUBLE AND TRIPLE GATE MOSFET DEVICES AND METHODS FOR MAKING SAME
AN, JUDY, XILIN, LIN, MING-REN, KRIVOKAPIC, ZORAN, YU, BIN, TABERY, CYRUS, E, WANG, HAIHONG
Year of Publication 10.06.2004
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Year of Publication 10.06.2004
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Self aligned damascene gate
Tabery, Cyrus E, Ahmed, Shibly S, Buynoski, Matthew S, Dakshina-Murthy, Srikanteswara, Krivokapic, Zoran, Wang, Haihong, Yang, Chih-Yuh, Yu, Bin
Year of Publication 18.04.2006
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Year of Publication 18.04.2006
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Self aligned damascene gate
BUYNOSKI MATTHEW S, WANG HAIHONG, YU BIN, AHMED SHIBLY S, TABERY CYRUS E, KRIVOKAPIC ZORAN, YANG CHIH-YUH, DAKSHINA-MURTHY SRIKANTESWARA
Year of Publication 18.04.2006
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Year of Publication 18.04.2006
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