Reducing Environmentally Induced Defects While Maintaining Productivity
van Roijen, R., Conti, S. G., Keyser, R., Arndt, R., Burda, R., Ayala, J., Henry, R. O., Levy, J., Maxson, J., Meyette, E., Steer, W., Tabakman, K., Chienfan Yu
Published in IEEE transactions on semiconductor manufacturing (01.02.2013)
Published in IEEE transactions on semiconductor manufacturing (01.02.2013)
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Journal Article
Conference Proceeding
SiGe Selective Epitaxy: Morphology and Thickness Control for High Performance CMOS Technology
Holt, Judson R., Harley, Eric C., Adam, Thomas N., Jeng, Shwu-Jen, Tabakman, Keith, Pal, Rohit, Nayfeh, Hasan M., Black, Linda R., Kempisty, Jeremy J., Stoker, Matthew W., Dube, Abhishek, Schepis, Dominic J.
Published in ECS transactions (2009)
Published in ECS transactions (2009)
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Journal Article
Third type of metal gate stack for CMOS devices
Jain, Sameer H, Divakaruni, Ramachandra, Tabakman, Keith H, Sardesai, Viraj Y
Year of Publication 11.08.2020
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Year of Publication 11.08.2020
Patent
APPARATUS AND METHOD FOR ALIGNING INTEGRATED CIRCUIT LAYERS USING MULTIPLE GRATING MATERIALS
Tabakman, Keith H, Hao, Xueli, Dai, Xintuo, He, Guanchen, Yang, Dongyue
Year of Publication 14.05.2020
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Year of Publication 14.05.2020
Patent
Apparatus and method for aligning integrated circuit layers using multiple grating materials
Tabakman, Keith H, Hao, Xueli, Dai, Xintuo, He, Guanchen, Yang, Dongyue
Year of Publication 28.04.2020
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Year of Publication 28.04.2020
Patent