Reactive ion etching of 6H-SiC in an ECR plasma of CF4-O2 mixtures using both Ni and Al masks
Syrkin, Alexander L., Bluet, Jean Marie, Camassel, Jean, Bonnot, Roger
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.04.1997)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.04.1997)
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Journal Article
"HVPE InGaN for LEDs- State of the art and horizons"
Syrkin, A.L.
Published in 2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference (01.05.2009)
Published in 2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference (01.05.2009)
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Conference Proceeding
HVPE apparatus and methods for growth of p-type single crystal group III nitride materials
SHAPOVALOV LISA, VOLKOVA ANNA, IVANTSOV VLADIMIR, SIZOV VLADIMIR, SOUKHOVEEV VITALI A, KOVALENKOV OLEG V, DMITRIEV VLADIMIR A, USIKOV ALEXANDER, SYRKIN ALEXANDER L
Year of Publication 11.02.2014
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Year of Publication 11.02.2014
Patent