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GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATION SYSTEM
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Year of Publication 20.10.2021
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Ion implantation system with mixture of arc chamber materials
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ION IMPLANTATION PROCESSES AND APPARATUS USING GALLIUM
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Year of Publication 21.07.2021
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FLUORINE ION IMPLANTATION SYSTEM WITH NON-TUNGSTEN MATERIALS AND METHODS OF USING
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Year of Publication 29.06.2021
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GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATION SYSTEM
SWEENEY, Joseph D, BYL, Oleg, TANG, Ying, DESPRES, Joseph Robert, YEDAVE, Sharad N
Year of Publication 24.03.2021
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Year of Publication 24.03.2021
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