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Year of Publication 01.10.2022
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Year of Publication 26.07.2018
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Year of Publication 05.07.2022
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Year of Publication 05.07.2022
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METHOD AND SYSTEM FOR IMPLANTING IONINC SPECIES INTO A SUBSTRATE
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Year of Publication 11.06.2022
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Year of Publication 11.06.2022
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SMART PACKAGE
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Year of Publication 06.06.2019
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Methods and systems useful for producing aluminum ions
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Year of Publication 16.05.2022
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Year of Publication 16.05.2022
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Carbon dopant gas and co-flow for implant beam and source life performance improvement
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Year of Publication 01.05.2018
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Endpoint determination for capillary-assisted flow control
Wodjenski Michael J, Avila Anthony M, Despres Joseph R, Baum Thomas H, Sweeney Joseph D
Year of Publication 25.04.2017
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Year of Publication 25.04.2017
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CARBON DOPANT GAS AND CO-FLOW FOR IMPLANT BEAM AND SOURCE LIFE PERFORMANCE IMPROVEMENT
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Year of Publication 18.04.2018
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Year of Publication 18.04.2018
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