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Sakai, Yushi, Shiba, Yoshinobu, Inada, Takafumi, Goto, Tetsuya, Suwa, Tomoyuki, Oikawa, Tetsu, Hamaya, Aoi, Sutoh, Akihito, Morimoto, Tatsuo, Shirai, Yasuyuki, Sugawa, Shigetoshi, Kuroda, Rihito
Published in IEEE transactions on semiconductor manufacturing (01.11.2023)
Published in IEEE transactions on semiconductor manufacturing (01.11.2023)
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Measuring Temporal Variation of Concentration of ALD Precursor TEMAZ in Process Chamber Using UV Absorption Method
Inada, Takafumi, Goto, Tetsuya, Suwa, Tomoyuki, Nagase, Masaaki, Ishii, Hidekazu, Shiba, Yoshinobu, Sakai, Yushi, Sutoh, Akihito, Morimoto, Tatsuo, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi
Published in ECS transactions (19.05.2023)
Published in ECS transactions (19.05.2023)
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Journal Article
Measuring Temporal Variation of Concentration of ALD Precursor TEMAZ in Process Chamber Using UV Absorption Method
Inada, Takafumi, Goto, Tetsuya, Suwa, Tomoyuki, Nagase, Masaaki, Ishii, Hidekazu, Shiba, Yoshinobu, Sakai, Yushi, Sutoh, Akihito, Morimoto, Tatsuo, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi
Published in Meeting abstracts (Electrochemical Society) (28.08.2023)
Published in Meeting abstracts (Electrochemical Society) (28.08.2023)
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In Situ Measurement and Analysis of Low Pressure Gas Concentration Distribution Using 70-dB SNR 1,000 Frame-Per-Second Absorption Imaging System
Sakai, Yushi, Shiba, Yoshinobu, Inada, Takafumi, Goto, Tetsuya, Suwa, Tomoyuki, Sutoh, Akihito, Morimoto, Tatsuo, Shirai, Yasuyuki, Sugawa, Shigetoshi, Oikawa, Tetsu, Hamaya, Aoi, Kuroda, Rihito
Published in 2022 International Symposium on Semiconductor Manufacturing (ISSM) (12.12.2022)
Published in 2022 International Symposium on Semiconductor Manufacturing (ISSM) (12.12.2022)
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Conference Proceeding
Hepatitis C virus G1b infection decreases the number of small low-density lipoprotein particles
Kinoshita, Chika, Nagano, Tomohisa, Seki, Nobuyoshi, Tomita, Yoichi, Sugita, Tomonori, Aida, Yuta, Itagaki, Munenori, Satoh, Kenichi, Sutoh, Satoshi, Abe, Hiroshi, Tsubota, Akihito, Aizawa, Yoshio
Published in World journal of gastroenterology : WJG (07.08.2016)
Published in World journal of gastroenterology : WJG (07.08.2016)
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