The microstructure and X-ray reflectivity of Mo/Si multilayers
Andreev, S.S, Gaponov, S.V, Gusev, S.A, Haidl, M.N, Kluenkov, E.B, Prokhorov, K.A, Polushkin, N.I, Sadova, E.N, Salashchenko, N.N, Suslov, L.A, Zuev, S.Yu
Published in Thin solid films (01.08.2002)
Published in Thin solid films (01.08.2002)
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Stress reduction of Mo/Si multilayer structures
Andreev, S.S., Salashchenko, N.N., Suslov, L.A., Yablonsky, A.N., Zuev, S.Yu
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.09.2001)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.09.2001)
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Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy
Chkhalo, N.I., Kluenkov, E.B., Pestov, A.E., Polkovnikov, V.N., Raskin, D.G., Salashchenko, N.N., Suslov, L.A., Toropov, M.N.
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2009)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2009)
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Prospects of low-coherence tandem interferometry for measurements of aspherical surface profiles
Akhsakhalyan, A. A., Akhsakhalyan, A. D., Volkov, P. V., Goryunov, A. V., Luk’yanov, A. Yu, Suslov, L. A., Tertyshnik, A. D.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.07.2015)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.07.2015)
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Apparatus for the magnetron and ion-beam synthesis of multilayer structures
Zabrodin, I. G., Zakalov, B. A., Kas’kov, I. A., Klyuenkov, E. B., Polkovnikov, V. N., Salashchenko, N. N., Starikov, S. D., Suslov, L. A.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.07.2013)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.07.2013)
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Switching kinetics in epitaxial PZT thin films
Shur, V.Ya, Makarov, S.D., Ponomarev, N.Yu, Volegov, V.V., Tonkachyova, N.A., Suslov, L.A., Salashchenko, N.N., Kluenkov, E.V.
Published in Microelectronic engineering (01.12.1995)
Published in Microelectronic engineering (01.12.1995)
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A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm
Volgunov, D. G., Zabrodin, I. G., Zakalov, B. A., Zuev, S. Yu, Kas’kov, I. A., Kluenkov, E. B., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Suslov, L. A., Toropov, M. N., Chkhalo, N. I.
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
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Fatigue in epitaxial lead zirconate titanate films
Shur, V. Ya, Ponomarev, N. Yu, Tonkacheva, N. A., Makarov, S. D., Nikolaeva, E. V., Shishkin, E. I., Suslov, L. A., Salashchenko, N. N., Klyuenkov, E. B.
Published in Physics of the solid state (01.04.1997)
Published in Physics of the solid state (01.04.1997)
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A technological complex for manufacturing of precise imaging optics
Zuev, S. Yu, Kluenkov, E. B., Pestov, A. E., Poikovnikov, V. N., Salashchenko, N. N., Suslov, L. A., Toropov, M. N., Chkhalo, N. I.
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
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Journal Article
The microstructure and X-ray reflectivity of Mo/Si multilayers
ANDREEV, S. S, GAPONOV, S. V, ZUEV, S. Yu, GUSEV, S. A, HAIDL, M. N, KLUENKOV, E. B, PROKHOROV, K. A, POLUSHKIN, N. I, SADOVA, E. N, SALASHCHENKO, N. N, SUSLOV, L. A
Published in Thin solid films (2002)
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Published in Thin solid films (2002)
Journal Article
Switching kinetics in epitaxial PZT thin films
SHUR, V. YA, MAKAROV, S. D, PONOMAREV, N. YU, VOLEGOV, V. V, TONKACHYOVA, N. A, SUSLOV, L. A, SALASHCHENKO, N. N, KLUENKOV, E. V
Published in Microelectronic engineering (1995)
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Published in Microelectronic engineering (1995)
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