Search Results - "Sung, Doug Yong" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Synthetic molecular spectra modeling for determining rotational, vibrational, and excitation temperatures of low-pressure nitrogen plasma

Synthetic molecular spectra modeling for determining rotational, vibrational, and excitation temperatures of low-pressure nitrogen plasma

by Han, Jonggu, Park, Woojin, Kim, Jongsik, Lim, Keon-Hee, Lee, Gwang-Ho, In, Seongjin, Park, Jitae, Oh, Se-Jin, Nam, Sang Ki, Sung, Doug-Yong, Moon, Se Youn
Published in Spectrochimica acta. Part A, Molecular and biomolecular spectroscopy (05.01.2024)

Get full text

Journal Article

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

by OH SE JIN, SUNG DOUG YONG
Year of Publication 17.07.2024

Get full text

Patent

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

by KIM NAM KYUN, KIM MIN SUNG, KIM YUN HWAN, NOH YOUNG JIN, SUNG DOUG YONG
Year of Publication 18.12.2023

Get full text

Patent

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

by KIM HAK YOUNG, BANG KYEONG TEA, SUNG DOUG YONG
Year of Publication 22.02.2022

Get full text

Patent

SUBSTRATE PROCESSING APPARATUS INCLUDING A PLURALITY OF ELECTRODES

SUBSTRATE PROCESSING APPARATUS INCLUDING A PLURALITY OF ELECTRODES

by KIM NAM KYUN, KIM YUN HWAN, NOH YOUNG JIN, KIM BYEONG SANG, SUNG DOUG YONG
Year of Publication 05.04.2023

Get full text

Patent

PLASMA DENSITY MEASUREMENT SENSOR APPARATUS FOR MEASURING REAL-TIME PLASMA DENSITY HAVING THE SAME AND OPERATING METHOD THEFEOF

PLASMA DENSITY MEASUREMENT SENSOR APPARATUS FOR MEASURING REAL-TIME PLASMA DENSITY HAVING THE SAME AND OPERATING METHOD THEFEOF

by JANG SUNG HO, VLADIMIR PROTOPOPOV, KWON DO HOON, CHO SUNG WON, NAM SANG KI, SUNG DOUG YONG
Year of Publication 20.08.2024

Get full text

Patent

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

by RHEE TAEK JOON, KIM YONG HEE, KIM HAK YOUNG, SUNG DOUG YONG, JEONG SANG MIN, HONG SUNG WOOK
Year of Publication 06.01.2023

Get full text

Patent

PLASMA APPARATUS

PLASMA APPARATUS

by KIM NAM KYUN, KIM HYUK, JANG SUNG HO, JO YOUNG HYUN, KO JUNG MIN, NAM SANG KI, SUNG DOUG YONG, YOO SU YOUNG, CHUNG KYOUNG SOO, KIM KYUNG HYUN
Year of Publication 28.08.2024

Get full text

Patent

APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABOSTORPTION AND OPERATING METHOD THEREOF

APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABOSTORPTION AND OPERATING METHOD THEREOF

by BANG JEONG MIN, JANG SUNG HO, OH SE JIN, PI JONG HUN, LEE YEONG KWANG, NAM SANG KI, SUNG DOUG YONG, KANG SUNG GIL
Year of Publication 21.05.2024

Get full text

Patent

GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

by KANG YOUNG IL, HAN KYU HEE, LIM SEUNG KYU, PARK YONG BEOM, LEE YUN JAE, KIM JONG MU, SUNG DOUG YONG
Year of Publication 19.06.2023

Get full text

Patent

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

by JUNG HWA JUN, HONG JUNG PYO, JEON YUN KWANG, KIM HAK YOUNG, SUN JONG WOO, SUNG DOUG YONG, LIM YONG HO
Year of Publication 30.05.2023

Get full text

Patent

Plasma etching device and processing method thereof

Plasma etching device and processing method thereof

by KIM NAM KYUN, BAEK SEUNG HAN, LEE JU HO, SHIM SEUNG BO, SUNG DOUG YONG
Year of Publication 25.04.2023

Get full text

Patent

IMPEDANCE MEASUREMENT JIG AND METHOD OF CONTROLLING A SUBSTRATE-PROCESSING APPARATUS USING THE JIG

IMPEDANCE MEASUREMENT JIG AND METHOD OF CONTROLLING A SUBSTRATE-PROCESSING APPARATUS USING THE JIG

by SEO IN SEOK, HUR MIN YOUNG, KIM YUN HWAN, KIM SUNG JIN, KIM BYEONG SANG, SUNG DOUG YONG, SHIM SEUNG BO, OKUNISHI NAOHIKO
Year of Publication 16.01.2023

Get full text

Patent

Apparatus for treating substrate

Apparatus for treating substrate

by KIM NAM KYUN, KIM YUN HWAN, KO JUNG MIN, YOON KUI HYUN, NAM SANG KI, KIM BYEONG SANG, SUNG DOUG YONG, YOO SU YOUNG
Year of Publication 12.10.2023

Get full text

Patent

PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM

PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM

by JANG SUNG HO, OH SE JIN, YANG JUNG MO, KIM YOUNG DO, KIM YUN HWAN, KIM BYEONG SANG, SUNG DOUG YONG
Year of Publication 22.03.2023

Get full text

Patent

Inductively Coupled Plasma Processing Apparatus

Inductively Coupled Plasma Processing Apparatus

by CHO SUNG HWAN, CHA JU HONG, JEONG JEE HUN, SHIM SEUNG BO, SUNG DOUG YONG, LEE HO JUN
Year of Publication 11.01.2022

Get full text

Patent

Plasma control apparatus and plasma processing system comprising the same apparatus

Plasma control apparatus and plasma processing system comprising the same apparatus

by NA DONG HYEON, HUR MIN YOUNG, KIM HYO SIN, SHIM SEUNG BO, SUNG DOUG YONG, JIN HA DONG
Year of Publication 02.12.2020

Get full text

Patent

apparatus for manufacturing a substrate and carbon protection film coating method of the same

apparatus for manufacturing a substrate and carbon protection film coating method of the same

by PARK, MYOUNG SOO, LIM, SEUNG KYU, SUNG, DOUG YONG
Year of Publication 01.12.2016

Get full text

Patent

PLASMA ETCHING APPARATUS

PLASMA ETCHING APPARATUS

by SUNG, DOUG YONG
Year of Publication 14.05.2010

Get full text

Patent

apparatus for processing plasma and method for manufacturing semiconductor device using the same

apparatus for processing plasma and method for manufacturing semiconductor device using the same

by HAN PETERBYUNGHOON, JEONG, JAE WON, SOHN, MIN KYU, SHIM, SEUNG BO, SUNG, DOUG YONG
Year of Publication 09.07.2018

Get full text

Patent

1
2
3
4
5
6
Next
[6]