Implementation of a Monolithic Single Proof-Mass Tri-Axis Accelerometer Using CMOS-MEMS Technique
Sun, Chih-Ming, Tsai, Ming-Han, Liu, Yu-Chia, Fang, Weileun
Published in IEEE transactions on electron devices (01.07.2010)
Published in IEEE transactions on electron devices (01.07.2010)
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Journal Article
Implementation of Complementary Metal--Oxide--Semiconductor Microelectromechanical Systems Lorentz Force Two Axis Angular Actuator
Sun, Chih-Ming, Wu, Chung-Lin, Wang, Chuanwei, Chang, Chun-I, Yip, Ming-Chuen, Fang, Weileun
Published in Japanese Journal of Applied Physics (01.06.2012)
Published in Japanese Journal of Applied Physics (01.06.2012)
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Journal Article
On the sensitivity improvement of CMOS capacitive accelerometer
Sun, Chih-ming, Wang, ChuanWei, Fang, Weileun
Published in Sensors and actuators. A. Physical. (15.02.2008)
Published in Sensors and actuators. A. Physical. (15.02.2008)
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Journal Article
A CMOS-MEMS accelerometer with tri-axis sensing electrodes arrays
Tsai, Ming-Han, Liu, Yu-Chia, Sun, Chih-Ming, Wang, Chuanwei, Fang, Weileun
Published in Procedia engineering (2010)
Published in Procedia engineering (2010)
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Journal Article
Implementation of fully-differential capacitance sensing accelerometer using glass proof-mass with Si-vias
Yi-Chang Hsu, Chiung-Wen Lin, Chih-Ming Sun, Chia-Pao Hsu, Yu-Tao Lee, Ming-Han Tsai, Yu-Chia Liu, Weileun Fang
Published in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (01.01.2011)
Published in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (01.01.2011)
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Conference Proceeding
A monolithic 3D fully-differential CMOS accelerometer
Ming-Han Tsai, Chih-Ming Sun, Chuanwei Wang, Jrhoung Lu, Weileun Fang
Published in 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems (01.01.2008)
Published in 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems (01.01.2008)
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Conference Proceeding
A novel double-side CMOS-MEMS post processing for monolithic sensor integration
Chih-Ming Sun, Chuanwei Wang, Ming-Han Tsai, Hsieh-Shen Hsie, Weileun Fang
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
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Conference Proceeding
A Novel Out-of-Plane Accelerometer with Fully-Differential Sensing Circuit and Sub-Micron Gap
Ming-Han Tsai, Chuanwei Wang, Chih-Ming Sun, Weileun Fang
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
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Conference Proceeding
Implementation of CMOS-MEMS Compound Lens
Chuanwei Wang, Sz-Yuan Lee, Chih-Ming Sun, Ming-Han Tsai, Weileun Fang
Published in 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (01.08.2007)
Published in 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (01.08.2007)
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Conference Proceeding