Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon
Sadamitsu, Shinsuke, Umeno, Shigeru, Koike, Yasuo, Hourai, Masataka, Shigeo Sumita, Shigeo Sumita, Tatsuhiko Shigematsu, Tatsuhiko Shigematsu
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01.09.1993)
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01.09.1993)
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Axial microscopic distribution of grown-in defects in Czochralski-grown silicon crystals
UMENO, S, SADAMITSU, S, MURAKAMI, H, HOURAI, M, SUMITA, S, SHIGEMATSU, T
Published in Japanese Journal of Applied Physics (01.05.1993)
Published in Japanese Journal of Applied Physics (01.05.1993)
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Influence of metal impurities on leakage current of Si N+P diode
MIYAZAKI, M, SANO, M, SUMITA, S, FUJINO, N
Published in Japanese Journal of Applied Physics (01.02.1991)
Published in Japanese Journal of Applied Physics (01.02.1991)
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Journal Article
Transmission electron microscopy observation of defects induced by Fe contamination on Si(100) surface
SADAMITSU, S, SASAKI, A, HOURAI, M, SUMITA, S, FUJINO, N
Published in Japanese Journal of Applied Physics (01.08.1991)
Published in Japanese Journal of Applied Physics (01.08.1991)
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A method of quantitative contamination with metallic impurities of the surface of a silicon wafer
HOURAI, M, NARIDOMI, T, OKA, Y, MURAKAMI, K, SUMITA, S, FUJINO, N, SHIRAIWA, T
Published in Japanese Journal of Applied Physics (01.12.1988)
Published in Japanese Journal of Applied Physics (01.12.1988)
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TEM observation of defects induced by Cu contamination on Si(100) surface
SADAMITSU, S, SUMITA, S, FUJINO, N, SHIRAIWA, T
Published in Japanese Journal of Applied Physics (01.10.1988)
Published in Japanese Journal of Applied Physics (01.10.1988)
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Dependence of Gettering Efficiency on Metal Impurities
Miyazaki, Morimasa, Sano, Masakazu, Sadamitsu, Shinsuke, Sumita, Shigeo, Fujino, Nobukatsu, Shiraiwa, Toshio
Published in Japanese Journal of Applied Physics (01.04.1989)
Published in Japanese Journal of Applied Physics (01.04.1989)
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Determination of metallic impurities on the surface of silicon wafers
TANIZOE, Yasuko, SUMITA, Shigeo, SANO, Masakazu, FUJINO, Nobukatsu, SHIRAIWA, Toshio
Published in BUNSEKI KAGAKU (1989)
Published in BUNSEKI KAGAKU (1989)
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The Physical Properties of Na2O-Fe2O3 and CaO-Fe2O3 Melts
SUMITA, Shigeo, MORINAGA, Ken-ji, YANAGASE, Tsutomu
Published in Nippon Kagakukai shi (1972) (01.06.1982)
Published in Nippon Kagakukai shi (1972) (01.06.1982)
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