PECVD synthesis and optical properties of BCXNY films obtained from N-triethylborazine as a single-source precursor
Sulyaeva, V.S., Kosinova, M.L., Rumyantsev, Yu.M., Kesler, V.G., Kuznetsov, F.A.
Published in Surface & coatings technology (15.09.2013)
Published in Surface & coatings technology (15.09.2013)
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Conference Proceeding
Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films
Merenkov, I.S., Katsui, H., Khomyakov, M.N., Sulyaeva, V.S., Pushkarev, R.V., Tu, R., Goto, T., Kosinova, M.L.
Published in Journal of the European Ceramic Society (01.12.2019)
Published in Journal of the European Ceramic Society (01.12.2019)
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Journal Article
Synthesis of Zirconium Diboride Films and ZrB2/BCxNy Heterostructures
Sulyaeva, V. S., Shestakov, V. A., Rumyantsev, Yu. M., Kosinova, M. L.
Published in Inorganic materials (2018)
Published in Inorganic materials (2018)
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Journal Article
Plasma enhanced chemical vapour deposition of BC x N y films prepared from N-trimethylborazine: Modelling, synthesis and characterization
Sulyaeva, V.S., Rumyantsev, Yu.M., Kosinova, M.L., Golubenko, A.N., Fainer, N.I., Kuznetsov, F.A.
Published in Surface & coatings technology (2007)
Published in Surface & coatings technology (2007)
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Journal Article
Plasma enhanced chemical vapour deposition of BCxNy films prepared from N-trimethylborazine : Modelling, synthesis and characterization
SULYAEVA, V. S, RUMYANTSEV, Yu. M, KOSINOVA, M. L, GOLUBENKO, A. N, FAINER, N. I, KUZNETSOV, F. A
Published in Surface & coatings technology (25.09.2007)
Published in Surface & coatings technology (25.09.2007)
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Conference Proceeding
Journal Article