Highly Conformal Thin Films of Tungsten Nitride Prepared by Atomic Layer Deposition from a Novel Precursor
Becker, Jill S, Suh, Seigi, Wang, Shenglong, Gordon, Roy G
Published in Chemistry of materials (29.07.2003)
Published in Chemistry of materials (29.07.2003)
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Vapor Deposition of Metal Oxides and Silicates: Possible Gate Insulators for Future Microelectronics
Gordon, Roy G, Becker, Jill, Hausmann, Dennis, Suh, Seigi
Published in Chemistry of materials (20.08.2001)
Published in Chemistry of materials (20.08.2001)
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Chemical Vapor Deposition of Cerium Oxide Films from a Cerium Alkoxide Precursor
Suh, Seigi, Guan, Jun, Mîinea, Liliana A, Lehn, Jean-Sébastien M, Hoffman, David M
Published in Chemistry of materials (04.05.2004)
Published in Chemistry of materials (04.05.2004)
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Synthesis and Structures of Gallium Alkylthiolate Compounds
Suh, Seigi, Hardesty, Jon H, Albright, Thomas A, Hoffman, David M
Published in Inorganic chemistry (05.04.1999)
Published in Inorganic chemistry (05.04.1999)
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