by Shibata, T., Sugoruo, K., Sughihara, K., Okumura, K., Nishihashi, T., Kashimoto, K., Fujiyama, J., Sakurada, Y., Gorou, T., Saji, N., Tsunoda, M.
Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)