Facile synthesis of SnO2-graphene composites employing nonthermal plasma and SnO2 nanoparticles-dispersed ethanol
Borude, Ranjit R, Sugiura, Hirotsugu, Ishikawa, Kenji, Tsutsumi, Takayoshi, Kondo, Hiroki, Hori, Masaru
Published in Journal of physics. D, Applied physics (18.02.2019)
Published in Journal of physics. D, Applied physics (18.02.2019)
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Journal Article
Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures
Sugiura, Hirotsugu, Ohashi, Yasuyuki, Ishikawa, Kenji, Kondo, Hiroki, Kato, Toshiaki, Kaneko, Toshiro, Takeda, Keigo, Tsutsumi, Takayoshi, Hayashi, Toshio, Sekine, Makoto, Hori, Masaru
Published in Diamond and related materials (01.04.2020)
Published in Diamond and related materials (01.04.2020)
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Journal Article
Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma
Borude, Ranjit R., Sugiura, Hirotsugu, Ishikawa, Kenji, Tsutsumi, Takayoshi, Kondo, Hiroki, Han, Jeon Geon, Hori, Masaru
Published in Japanese Journal of Applied Physics (01.02.2019)
Published in Japanese Journal of Applied Physics (01.02.2019)
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Journal Article
Control of sp2-C cluster incorporation of amorphous carbon films grown by H-radical-injection CH4/H2 plasma-enhanced chemical vapor deposition
Sugiura, Hirotsugu, Jia, Lingyun, Ohashi, Yasuyuki, Kondo, Hiroki, Ishikawa, Kenji, Tsutsumi, Takayoshi, Hayashi, Toshio, Takeda, Keigo, Sekine, Makoto, Hori, Masaru
Published in Japanese Journal of Applied Physics (13.02.2019)
Published in Japanese Journal of Applied Physics (13.02.2019)
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Journal Article
Effects of Ion Bombardment Energy Flux on Chemical Compositions and Structures of Hydrogenated Amorphous Carbon Films Grown by a Radical-Injection Plasma-Enhanced Chemical Vapor Deposition
Sugiura, Hirotsugu, Kondo, Hiroki, Tsutsumi, Takayoshi, Ishikawa, Kenji, Hori, Masaru
Published in C (Basel) (01.01.2019)
Published in C (Basel) (01.01.2019)
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Journal Article
Effects of Radical Species on Structural and Electronic Properties of Amorphous Carbon Films Deposited by Radical-Injection Plasma-Enhanced Chemical Vapor Deposition
Jia, Lingyun, Sugiura, Hirotsugu, Kondo, Hiroki, Takeda, Keigo, Ishikawa, Kenji, Oda, Osamu, Sekine, Makoto, Hiramatsu, Mineo, Hori, Masaru
Published in Plasma processes and polymers (01.07.2016)
Published in Plasma processes and polymers (01.07.2016)
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Journal Article
Effects of gas residence time of CH4/H2 on sp2 fraction of amorphous carbon films and dissociated methyl density during radical-injection plasma-enhanced chemical vapor deposition
Sugiura, Hirotsugu, Jia, Lingyun, Kondo, Hiroki, Ishikawa, Kenji, Tsutsumi, Takayoshi, Hayashi, Toshio, Takeda, Keigo, Sekine, Makoto, Hori, Masaru
Published in Japanese Journal of Applied Physics (25.05.2018)
Published in Japanese Journal of Applied Physics (25.05.2018)
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Journal Article
Single-Step, Low-Temperature Simultaneous Formations and in Situ Binding of Tin Oxide Nanoparticles to Graphene Nanosheets by In-Liquid Plasma for Potential Applications in Gas Sensing and Lithium-Ion Batteries
Borude, Ranjit R, Sugiura, Hirotsugu, Ishikawa, Kenji, Tsutsumi, Takayoshi, Kondo, Hiroki, Ikarashi, Nobuyuki, Hori, Masaru
Published in ACS applied nano materials (22.02.2019)
Published in ACS applied nano materials (22.02.2019)
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Journal Article
Effect of gas residence time on near-edge X-ray absorption fine structures of hydrogenated amorphous carbon films grown by plasma-enhanced chemical vapor deposition
Jia, Lingyun, Sugiura, Hirotsugu, Kondo, Hiroki, Takeda, Keigo, Ishikawa, Kenji, Oda, Osamu, Sekine, Makoto, Hiramatsu, Mineo, Hori, Masaru
Published in Japanese Journal of Applied Physics (01.04.2016)
Published in Japanese Journal of Applied Physics (01.04.2016)
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Journal Article
Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature
Sugiura, Hirotsugu, Kondo, Hiroki, Higuchi, Kimitaka, Arai, Shigeo, Hamaji, Ryo, Tsutsumi, Takayoshi, Ishikawa, Kenji, Hori, Masaru
Published in Carbon (New York) (01.12.2020)
Published in Carbon (New York) (01.12.2020)
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Journal Article
CHAMBER LINER FOR SUBSTRATE PROCESSING APPRATUS
SUGIURA HIROTSUGU, AIDA KOEI, KIKUCHI YOSHIYUKI, REMNEV ALEXEY, XUE LINGJUN
Year of Publication 21.05.2024
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Year of Publication 21.05.2024
Patent
CHAMBER LINER FOR SUBSTRATE PROCESSING APPARATUS
SUGIURA HIROTSUGU, AIDA KOEI, KIKUCHI YOSHIYUKI, XUE LINGJUN, ALEXEY REMNEV
Year of Publication 17.05.2024
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Year of Publication 17.05.2024
Patent
Facile synthesis of SnO 2 -graphene composites employing nonthermal plasma and SnO 2 nanoparticles-dispersed ethanol
Borude, Ranjit R, Sugiura, Hirotsugu, Ishikawa, Kenji, Tsutsumi, Takayoshi, Kondo, Hiroki, Hori, Masaru
Published in Journal of physics. D, Applied physics (24.04.2019)
Published in Journal of physics. D, Applied physics (24.04.2019)
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Journal Article