Lateral GaN MISFETs Fabricated in Mg Ion Implanted Layer
Yoshino, Michitaka, Sugamata, Kota, Tsuge, Hirofumi, Ikeda, Kiyoji, Kuriyama, Kazuo, Nakamura, Tohru
Published in Materials science forum (05.06.2018)
Published in Materials science forum (05.06.2018)
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Journal Article
Ion implanted GaN MISFETs fabricated in Mg implanted layers activated by conventional rapid thermal annealing
Yoshino, Michitaka, Sugamata, Kota, Ikeda, Kiyoji, Nishimura, Tomoaki, Kuriyama, Kazuo, Nakamura, Tohru
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.06.2019)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.06.2019)
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Journal Article