Gas-Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing
Takei, Satoshi, Nakajima, Shinya, Sugahara, Kigen, Hanabata, Makoto, Matsumoto, Yoko, Sekiguchi, Atsushi
Published in Macromolecular materials and engineering (01.08.2016)
Published in Macromolecular materials and engineering (01.08.2016)
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Journal Article
Development of Nanoimprint Lithography Template Materials using Biomass
Nakajima, Shinya, Takei, Satoshi, Zhou, Ziqi, Maki, Hirotaka, Sugahara, Kigen, Hanabata, Makoto, Matsumoto, Yoko, Sekiguchi, Atsushi
Published in Journal of Photopolymer Science and Technology (01.01.2016)
Published in Journal of Photopolymer Science and Technology (01.01.2016)
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Journal Article
Application of natural linear polysaccharide to green resist polymers for electron beam and extreme-ultraviolet lithography
Takei, Satoshi, Oshima, Akihiro, Oyama, Tomoko G., Ito, Kenta, Sugahara, Kigen, Kashiwakura, Miki, Kozawa, Takahiro, Tagawa, Seiichi, Hanabata, Makoto
Published in Japanese Journal of Applied Physics (01.11.2014)
Published in Japanese Journal of Applied Physics (01.11.2014)
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Journal Article
Green Lithography Using Water-Developable Sugar-Based Negative Resist Materials
Takei, Satoshi, Hanabata, Makoto, Sugahara, Kigen, Sugino, Naoto, Kameda, Takao, Fukushima, Jiro
Published in MRS advances (01.01.2016)
Published in MRS advances (01.01.2016)
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