Deposition of thin Si and Ge films by ballistic hot electron reduction in a solution-dripping mode and its application to the growth of thin SiGe films
Suda, Ryutaro, Yagi, Mamiko, Kojima, Akira, Mentek, Romain, Mori, Nobuya, Shirakashi, Jun-ichi, Koshida, Nobuyoshi
Published in Japanese Journal of Applied Physics (01.04.2015)
Published in Japanese Journal of Applied Physics (01.04.2015)
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Journal Article
Low-Temperature Deposition of Thin Si, Ge, and SiGe Films Using Reducing Activity of Ballistic Hot Electrons
Koshida, Nobuyoshi, Suda, Ryutaro, Yagi, Mamiko, Kojima, Akira, Mentek, Romain, Gelloz, Bernard, Mori, Nobuya, Shirakashi, Junichi
Published in ECS transactions (12.08.2014)
Published in ECS transactions (12.08.2014)
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Journal Article
Double-sided computer-generated holography
Suda, Ryutaro, Nishizaki, Yohei, Naruse, Makoto, Horisaki, Ryoichi
Published in Optics letters (15.04.2023)
Published in Optics letters (15.04.2023)
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ETCHING METHOD AND PLASMA PROCESSING APPARATUS
TANAKA KOKI, YOKOI MASAHIKO, TANAKA KAZUMITSU, NAGAI RYU, SUDA RYUTARO
Year of Publication 07.03.2024
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Year of Publication 07.03.2024
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