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HIGH-SPEED DIAMOND GROWTH USING A MICROWAVE PLASMA IN PULSED MODE
KHALED HASSOUNI, GUILLAUME, VINCENT LOMBARDI, FRANCOIS SILVA, ANTOINE ROUSSEAU, XAVIER DUTEN, ALIX, HELENE GICQUEL
Year of Publication 10.08.2004
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Year of Publication 10.08.2004
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High-speed diamond growth using a microwave plasma in pulsed mode
KHALED HASSOUNI, ALIX HELENE GICQUEL, FRANCOIS SILVA, GUILLAUME VINCENT LOMBARDI, ANTOINE ROUSSEAU, XAVIER DUTEN
Year of Publication 10.08.2004
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Year of Publication 10.08.2004
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HIGH-SPEED DIAMOND GROWTH USING A MICROWAVE PLASMA IN PULSEDMODE
HASSOUNI, KHALED, GICQUEL, ALIX HELENE, LOMBARDI, GUILLAUME VINCENT, DUTEN, XAVIER, SILVA, FRANCOIS, ROUSSEAU, ANTOINE
Year of Publication 29.07.2004
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Year of Publication 29.07.2004
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A method and apparatus for achieving temperature uniformity of a substrate
DEATON, PAUL, BALLANCE, DAVID S, WILLIAMS, MEREDITH J, BIERMAN, BENJAMIN, HAAS, BRIAN
Year of Publication 11.01.2001
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Year of Publication 11.01.2001
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Fabrication and Performance of InAlN/GaN-on-Si MOSHEMTs with LaAlO 3 Gate Dielectric Using Gate-First CMOS Compatible Process at Low Thermal Budget
Bera, Milan Kumar, Liu, Yi, Kyaw, Lwin Min, Ngoo, Yi Jie, Singh, Sarab Preet, Chor, Eng Fong
Published in Meeting abstracts (Electrochemical Society) (01.04.2014)
Published in Meeting abstracts (Electrochemical Society) (01.04.2014)
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Method and apparatus for achieving temperature uniformity of a substrate
BALLANCE; DAVID S, DEATON; PAUL, TIETZ; JAMES V, TAKAHASHI; NOBUYUKI, HAAS; BRIAN, BIERMAN; BENJAMIN, WILLIAMS; MEREDITH J
Year of Publication 26.09.2000
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Year of Publication 26.09.2000
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HIGH-SPEED DIAMOND GROWTH USING A MICROWAVE PLASMA IN PULSED MODE
HASSOUNI, KHALED, LOMBARDI, GUILLAUME, VINCENT, SILVA, FRANCOIS, DUTEN, XAVIER, GICQUEL, ALIX, HELENE, ROUSSEAU, ANTOINE
Year of Publication 29.07.2004
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Year of Publication 29.07.2004
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