Search Results - "Subramonium, Pramod Subramonium" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Enabling High Aspect Ratio 3D NAND Scaling through Deposition and Etch Co-Optimization (DECO)

Enabling High Aspect Ratio 3D NAND Scaling through Deposition and Etch Co-Optimization (DECO)

by Shen, Meihua, Hoang, John, Chi, Hao, Routzahn, Aaron, Church, Jonathan, Subramonium, Pramod Subramonium, Puthenkovilakam, Ragesh, Reddy, Sirish Reddy, Bhadauriya, Sonal, Roberts, Sloan, Lill, Thorsten, Kamarthy, Gowri
Published in Meeting abstracts (Electrochemical Society) (09.10.2022)

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Journal Article

Progress report on high aspect ratio patterning for memory devices

Progress report on high aspect ratio patterning for memory devices

by Shen, Meihua, Lill, Thorsten, Hoang, John, Chi, Hao, Routzahn, Aaron, Church, Jonathan, Subramonium, Pramod, Puthenkovilakam, Ragesh, Reddy, Sirish, Bhadauriya, Sonal, Roberts, Sloan, Kamarthy, Gowri
Published in Japanese Journal of Applied Physics (01.07.2023)

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Journal Article

Patterning with Amorphous Carbon Thin Films

Patterning with Amorphous Carbon Thin Films

by Antonelli, George A., Reddy, Sirish, Subramonium, Pramod, Henri, Jon, Sims, Jim, O'loughlin, Jennifer, Shamma, Nader, Schlosser, Don, Mountsier, Tom, Guo, Wei, Sawin, Herb
Published in ECS transactions (01.01.2011)

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Journal Article

PECVD apparatus for in-situ deposition of film stacks

PECVD apparatus for in-situ deposition of film stacks

by Subramonium, Pramod, Niu, Dong, Womack, Joseph L, Fox, Keith
Year of Publication 05.09.2023

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Patent

Nitride films with improved etch selectivity for 3D NAND integration

Nitride films with improved etch selectivity for 3D NAND integration

by Subramonium, Pramod, Yoshizawa, Katsunori, VanSchravendijk, Bart J, Shankar, Nagraj, Samantaray, Malay Milan
Year of Publication 16.07.2024

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Patent

DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF

DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF

by Weimer, Matthew Scott, Subramonium, Pramod, Puthenkovilakam, Ragesh, Bai, Rujun, French, David
Year of Publication 11.07.2024

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Patent

DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF

DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF

by Weimer, Matthew Scott, Subramonium, Pramod, Puthenkovilakam, Ragesh, Bai, Rujun, French, David
Year of Publication 25.04.2024

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Patent

REDUCED TEMPERATURE ETCHING OF DOPED SILICON OXIDE

REDUCED TEMPERATURE ETCHING OF DOPED SILICON OXIDE

by HOANG, John, VEGH, Joseph James, SUBRAMONIUM, Pramod, CHI, Hao, CHURCH, Jonathan, YILMAZ, Mehmet Fatih
Year of Publication 07.12.2023

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Patent

Depositing a carbon hardmask by high power pulsed low frequency RF

Depositing a carbon hardmask by high power pulsed low frequency RF

by Weimer, Matthew Scott, Subramonium, Pramod, Puthenkovilakam, Ragesh, Bai, Rujun, French, David
Year of Publication 05.12.2023

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Patent

HIGH MODULUS CARBON DOPED SILICON OXIDE FILM FOR MOLD STACK SCALING SOLUTIONS IN ADVANCED MEMORY APPLICATIONS

HIGH MODULUS CARBON DOPED SILICON OXIDE FILM FOR MOLD STACK SCALING SOLUTIONS IN ADVANCED MEMORY APPLICATIONS

by REDDY, Kapu Sirish, SUBRAMONIUM, Pramod, BANERJI, Ananda K, HAYNES, Katherine Elizabeth, SAMANTARAY, Malay Milan, HAMMA, Soumana
Year of Publication 23.11.2023

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Patent

SHOWERHEAD FACEPLATE CONFIGURATIONS

SHOWERHEAD FACEPLATE CONFIGURATIONS

by BABBAR, Yogesh, LUO, Bin, CHENG, Weifeng, MARTIN, Keith Joseph, SUBRAMONIUM, Pramod, TOPPING, Stephen
Year of Publication 01.06.2023

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Patent

HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN DIAMOND-LIKE CARBON HARDMASKS BY HIGH POWER PULSED LOW FREQUENCY RF

HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN DIAMOND-LIKE CARBON HARDMASKS BY HIGH POWER PULSED LOW FREQUENCY RF

by Weimer, Matthew Scott, Subramonium, Pramod, Puthenkovilakam, Ragesh, Bai, Rujun, French, David
Year of Publication 07.07.2022

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Patent

METHOD AND APPARATUS FOR RADIO FREQUENCY GRID DESIGN IN AN ESC TO REDUCE FILM ASYMMETRY

METHOD AND APPARATUS FOR RADIO FREQUENCY GRID DESIGN IN AN ESC TO REDUCE FILM ASYMMETRY

by CHANDRASEKHARAN, Ramesh, BREILING, Patrick G, BELOSTOTSKIY, Sergey Georgiyevich, SUBRAMONIUM, Pramod, VAHIDI, Mahmoud, BAKER, Noah Elliot, FRENCH, David, SAKIYAMA, Yukinori, MAMUNURU, Meenakshi, TOPPING, Stephen, THOMAS, Timothy Scott, SAURABH, Ashish
Year of Publication 03.08.2023

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Patent

NITRIDE FILMS WITH IMPROVED ETCH SELECTIVITY FOR 3D NAND INTEGRATION

NITRIDE FILMS WITH IMPROVED ETCH SELECTIVITY FOR 3D NAND INTEGRATION

by Subramonium, Pramod, Yoshizawa, Katsunori, VanSchravendijk, Bart J, Shankar, Nagraj, Samantaray, Malay Milan
Year of Publication 14.10.2021

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Patent

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

by Subramonium, Pramod, van Schravendijk, Bart J, Sriram, Mandyam A, Petraglia, Jennifer L, Niu, Dong, Antonelli, George Andrew, Breiling, Patrick G, Alexy, John B, Womack, Joseph L, Haverkamp, Jason Dirk, Fox, Keith
Year of Publication 16.11.2023

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Patent

Methods for formation of low-k aluminum-containing etch stop films

Methods for formation of low-k aluminum-containing etch stop films

by Subramonium Pramod, Damjanovic Daniel, Shankar Nagraj
Year of Publication 25.04.2017

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Patent

METHODS FOR FORMATION OF LOW-K ALUMINUM-CONTAINING ETCH STOP FILMS

METHODS FOR FORMATION OF LOW-K ALUMINUM-CONTAINING ETCH STOP FILMS

by Subramonium Pramod, Damjanovic Daniel, Shankar Nagraj
Year of Publication 13.04.2017

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Patent

HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN DIAMOND-LIKE CARBON HARDMASKS BY HIGH POWER PULSED LOW FREQUENCY RF

HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN DIAMOND-LIKE CARBON HARDMASKS BY HIGH POWER PULSED LOW FREQUENCY RF

by WEIMER, Matthew Scott, BAI, Rujun, SUBRAMONIUM, Pramod, FRENCH, David, PUTHENKOVILAKAM, Ragesh
Year of Publication 03.12.2020

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Patent

NITRIDE FILMS WITH IMPROVED ETCH SELECTIVITY FOR 3D NAND INTEGRATION

NITRIDE FILMS WITH IMPROVED ETCH SELECTIVITY FOR 3D NAND INTEGRATION

by SHANKAR, Nagraj, SUBRAMONIUM, Pramod, SAMANTARAY, Malay, YOSHIZAWA, Katsunori, VAN SCHRAVENDIJK, Bart
Year of Publication 14.05.2020

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Patent

Systems and methods for tilting a wafer for achieving deposition uniformity

Systems and methods for tilting a wafer for achieving deposition uniformity

by Pasquale, Frank L, Subramonium, Pramod, Ha, Jeongseok, Swaminathan, Shankar, Baldasseroni, Chloe
Year of Publication 21.01.2020

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Patent

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