내화학성 표면들을 갖는 RF 컴포넌트들
SUBRAMANI ANANTHA K, JANAKIRAMAN KARTHIK, SOMMERS JOSEPH F, SRINIVASAN SWAMINATHAN
Year of Publication 13.01.2022
Get full text
Year of Publication 13.01.2022
Patent
SHAPED ELECTRODES FOR IMPROVED PLASMA EXPOSURE FROM VERTICAL PLASMA SOURCE
DZILNO DMITRY A, SUBRAMANI ANANTHA K, TANAKA TSUTOMU, BERA KALLOL, FORSTER JOHN C
Year of Publication 30.08.2022
Get full text
Year of Publication 30.08.2022
Patent
반도체 처리 시스템들의 분배 컴포넌트들
RAMAMURTHI BADRI N, SUBRAMANI ANANTHA K, GUO YANG, PATHAK NITIN, LI XIAOPU, KRAUS PHILIP A, SRINIVASAN SWAMINATHAN, FAZELI SEYYED ABDOLREZA, BERA KALLOL
Year of Publication 21.03.2023
Get full text
Year of Publication 21.03.2023
Patent
PE-ALD MICROWAVE PLASMA SOURCE FOR SPATIAL PLASMA ENHANCED ATOMIC LAYER DEPOSITION PE-ALD PROCESSING TOOL
DZILNO DMITRY A, SUBRAMANI ANANTHA K, GARACHTCHENKO ALEXANDER V, LI XIAOPU, TANAKA TSUTOMU, SHERVEGAR AVINASH, BERA KALLOL, FORSTER JOHN C, KUDELA JOZEF
Year of Publication 09.02.2023
Get full text
Year of Publication 09.02.2023
Patent
PLASMA SOURCE FOR ROTATING SUSCEPTOR
SUBRAMANI ANANTHA K, KRAUS PHILIP A, HOUSHMAND FARZAD, BERA KALLOL, FORSTER JOHN C, CHEN HANHONG
Year of Publication 12.03.2021
Get full text
Year of Publication 12.03.2021
Patent
인터레이스식 가스 공급 및 제거를 갖는 샤워헤드 및 사용 방법들
SUBRAMANI ANANTHA K, CARDUCCI JAMES, KNYAZIK VLADMIR, RAUF SHAHID, BERA KALLOL
Year of Publication 17.11.2020
Get full text
Year of Publication 17.11.2020
Patent
수직 플라즈마 소스로부터의 개선된 플라즈마 노출을 위한 성형된 전극들
DZILNO DMITRY A, SUBRAMANI ANANTHA K, TANAKA TSUTOMU, BERA KALLOL, FORSTER JOHN C
Year of Publication 22.07.2020
Get full text
Year of Publication 22.07.2020
Patent