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SRINIVASAN SWAMINATHAN T, MORADIAN ALA, REIMER PETER, ISHIKAWA TETSUYA, RICE MICHAEL R, SHAH KARTIK BHUPENDRA, SUBBANNA MANJUNATH, BAUER MATTHIAS
Year of Publication 22.08.2023
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Year of Publication 22.08.2023
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에피택셜 증착 및 고급 에피택셜 필름 애플리케이션들을위한 챔버 아키텍쳐
SRINIVASAN SWAMINATHAN T, MORADIAN ALA, REIMER PETER, ISHIKAWA TETSUYA, RICE MICHAEL R, SHAH KARTIK BHUPENDRA, SUBBANNA MANJUNATH, BAUER MATTHIAS
Year of Publication 22.08.2023
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Year of Publication 22.08.2023
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에피택시 및 CVD 챔버용 가스 인젝터
SRINIVASAN SWAMINATHAN T, MORADIAN ALA, REIMER PETER, ISHIKAWA TETSUYA, SANCHEZ ERROL ANTONIO C, RICE MICHAEL R, SHAH KARTIK BHUPENDRA, SUBBANNA MANJUNATH, BAUER MATTHIAS, ZOKAEI SOHRAB
Year of Publication 22.08.2023
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Year of Publication 22.08.2023
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에피택셜 증착 챔버를 위한 다중 포트 배기 시스템
SRINIVASAN SWAMINATHAN T, MORADIAN ALA, SHULL MARC, REIMER PETER, ISHIKAWA TETSUYA, SANCHEZ ERROL ANTONIO C, RICE MICHAEL R, SHAH KARTIK BHUPENDRA, SUBBANNA MANJUNATH, BAUER MATTHIAS
Year of Publication 22.08.2023
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Year of Publication 22.08.2023
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HEAT SHIELD ASSEMBLIES FOR MINIMIZING HEAT RADIATION TO PUMP OF PROCESS CHAMBER
HUDERI SOMANNA, Dinkesh, DICKINSON, Colin John, MORADIAN, Ala, SUBBANNA, Manjunath
Year of Publication 14.09.2023
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Year of Publication 14.09.2023
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HEAT SHIELD ASSEMBLIES FOR MINIMIZING HEAT RADIATION TO PUMP OF PROCESS CHAMBER
HUDERI SOMANNA, Dinkesh, DICKINSON, Colin John, MORADIAN, Ala, SUBBANNA, Manjunath
Year of Publication 14.09.2023
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Year of Publication 14.09.2023
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MULTI-ZONE LAMP HEATING FOR CHEMICAL VAPOR DEPOSITION
MORADIAN, Ala, ISHIKAWA, Tetsuya, SUBBANNA, Manjunath, VELLORE, Kim, MILLER, Matthew, RICE, Michael
Year of Publication 02.11.2023
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Year of Publication 02.11.2023
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MULTI-ZONE LAMP HEATING FOR CHEMICAL VAPOR DEPOSITION
Vellore, Kim, Moradian, Ala, Subbanna, Manjunath, Rice, Michael, Miller, Matthew, Ishikawa, Tetsuya
Year of Publication 02.11.2023
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Year of Publication 02.11.2023
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Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet
Shah, Kartik Bhupendra, Bauer, Matthias, Sanchez, Errol Antonio C, Moradian, Ala, Rice, Michael R, Subbanna, Manjunath, Reimer, Peter, Ishikawa, Tetsuya, Srinivasan, Swaminathan T, Shull, Marc
Year of Publication 17.09.2024
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Year of Publication 17.09.2024
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