Phase Composition and Surface Morphology of Thin AlN Films Obtained trough Magnetron Sputtering
Baranova, L. V., Strunin, V. I., Baysova, B. T., Chirikov, N. A.
Published in High energy chemistry (01.10.2023)
Published in High energy chemistry (01.10.2023)
Get full text
Journal Article
The method of the research of residual gases in a tight case of quartz resonators
Belousov, K A, Strunin, V I, Khudaibergenov, G Zh
Published in Journal of physics. Conference series (01.01.2020)
Published in Journal of physics. Conference series (01.01.2020)
Get full text
Journal Article
The mechanical stresses in the molybdenum films formed by magnetron sputtering on a sitall substrate
Strunin, V I, Zeema, V N, Chirikov, N A, Kozlov, A G
Published in Journal of physics. Conference series (01.08.2019)
Published in Journal of physics. Conference series (01.08.2019)
Get full text
Journal Article
Peculiarities of the Processing of Polycrystalline AlN Films on Glass-Ceramic and Si Substrates by Argon Cluster Ions
Nikolaev, I. V., Korobeishchikov, N. G., Geydt, P. V., Chirikov, N. A., Strunin, V. I.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.08.2022)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.08.2022)
Get full text
Journal Article
Smoothing of Polycrystalline AlN Thin Films with Argon Cluster Ions
Nikolaev, I. V., Korobeishchikov, N. G., Roenko, M. A., Geydt, P. V., Strunin, V. I.
Published in Technical physics letters (01.04.2021)
Published in Technical physics letters (01.04.2021)
Get full text
Journal Article
Supersonic plasma outflow in a plasmochemical method of amorphous silicon thin films formation
Baranova, L V, Strunin, V I, Khudaibergenov, G Zh
Published in Journal of physics. Conference series (01.01.2018)
Published in Journal of physics. Conference series (01.01.2018)
Get full text
Journal Article
A Study of a Temperature Effect on Characteristics of a Solidly Mounted Resonator Based on AlN, Al, Mo and Ti Thin Films
Ulaeva, T. N., Zhilin, N. M., Chirikov, N. A., Strunin, V. I.
Published in 2024 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (03.06.2024)
Published in 2024 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (03.06.2024)
Get full text
Conference Proceeding
Investigation of Temperature Effect on Electrical Characteristics of Solidly Mounted Resonator
Torgash, T. N., Chirikov, N. A., Kozlov, A. G., Strunin, V. I.
Published in 2022 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (30.05.2022)
Published in 2022 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (30.05.2022)
Get full text
Conference Proceeding