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Year of Publication 11.07.2024
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APPARATUSES FOR THERMAL MANAGEMENT OF A PEDESTAL AND CHAMBER
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Year of Publication 31.07.2024
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REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING
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Year of Publication 30.03.2023
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Apparatuses for thermal management of a pedestal and chamber
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Year of Publication 01.04.2023
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Year of Publication 14.03.2023
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Remote plasma deposition with electrostatic clamping
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Year of Publication 04.06.2024
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Remote plasma deposition with electrostatic clamping
VAN SCHRAVENDIJK, BART J, SRINIVASAN, EASWAR, GUPTA, AWNISH, STRENG, BRADLEY TAYLOR, WEI, FENGYAN, DURBIN, AARON, BAKER, NOAH ELLIOT, MILLER, AARON BLAKE, HENRI, JON
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Year of Publication 01.08.2023
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