2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride
Meinel, Katja, Melzer, Marcel, Stoeckel, Chris, Shaporin, Alexey, Forke, Roman, Zimmermann, Sven, Hiller, Karla, Otto, Thomas, Kuhn, Harald
Published in Sensors (Basel, Switzerland) (18.11.2020)
Published in Sensors (Basel, Switzerland) (18.11.2020)
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Journal Article
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
Stoeckel, Chris, Meinel, Katja, Melzer, Marcel, Žukauskaitė, Agnė, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Kuhn, Harald
Published in Micromachines (Basel) (15.04.2022)
Published in Micromachines (Basel) (15.04.2022)
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Journal Article
Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride
Meinel, Katja, Stoeckel, Chris, Melzer, Marcel, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Otto, Thomas
Published in IEEE sensors journal (15.04.2021)
Published in IEEE sensors journal (15.04.2021)
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Journal Article
Correction to: Co-sputtering of Al.sub.1-xSc.sub.xN thin films on Pt
Solonenko, Dmytro, Lan, Chuanqi, Schmidt, Constance, Stoeckel, Chris, Hiller, Karla, Zahn, Dietrich R. T
Published in Journal of materials science (01.10.2021)
Published in Journal of materials science (01.10.2021)
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Journal Article
Correction to: Co-sputtering of Al.sub.1-xSc.sub.xN thin films on Pt: a characterization by Raman and IR spectroscopies
Solonenko, Dmytro, Lan, Chuanqi, Schmidt, Constance, Stoeckel, Chris, Hiller, Karla, Zahn, Dietrich R. T
Published in Journal of materials science (01.10.2021)
Published in Journal of materials science (01.10.2021)
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Journal Article
Co-sputtering of [Formula omitted] thin films on Pt
Solonenko, Dmytro, Lan, Chuanqi, Schmidt, Constance, Stoeckel, Chris, Hiller, Karla, Zahn, Dietrich R. T
Published in Journal of materials science (01.12.2020)
Published in Journal of materials science (01.12.2020)
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Journal Article
Co-sputtering of $$\hbox {Al}_{1-x}\hbox {Sc}_{x}\hbox {N}$$ thin films on Pt(111): a characterization by Raman and IR spectroscopies
Solonenko, Dmytro, Lan, Chuanqi, Schmidt, Constance, Stoeckel, Chris, Hiller, Karla, Zahn, Dietrich R. T.
Published in Journal of materials science (01.12.2020)
Published in Journal of materials science (01.12.2020)
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Journal Article
Correction to: Co-sputtering of Al1−xScxN thin films on Pt(111): a characterization by Raman and IR spectroscopies
Solonenko, Dmytro, Lan, Chuanqi, Schmidt, Constance, Stoeckel, Chris, Hiller, Karla, Zahn, Dietrich R. T.
Published in Journal of materials science (01.10.2021)
Published in Journal of materials science (01.10.2021)
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Journal Article
Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined Ultrasonic Transducers
Stoeckel, Chris, Meinel, Katia, Melzer, Marcel, Otto, Thomas
Published in 2018 IEEE SENSORS (01.10.2018)
Published in 2018 IEEE SENSORS (01.10.2018)
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Conference Proceeding
Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride
Meinel, Katja, Stoeckel, Chris, Melzer, Marcel, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Otto, Thomas
Published in 2019 IEEE SENSORS (01.10.2019)
Published in 2019 IEEE SENSORS (01.10.2019)
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Conference Proceeding
Precise determination of piezoelectric longitudinal charge coefficients for piezoelectric thin films assisted by finite element modeling
Stoeckel, Chris, Kaufmann, Christian, Schulze, Robert, Billep, Detlef, Gessner, Thomas
Published in 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM) (01.07.2013)
Published in 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM) (01.07.2013)
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Conference Proceeding
Accelerated Stress Testing for High-Cycle Fatigue of thin Al Films on piezo-driven MEMS Cantilever
Johrmann, Nathanael, Stockel, Chris, Wunderle, Bernhard
Published in 2022 28th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) (28.09.2022)
Published in 2022 28th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) (28.09.2022)
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Conference Proceeding
Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements
Shaporin, Alexey, Stockel, Chris, Melzer, Marcel, Schaller, Falk, Forke, Roman, Zimmermann, Sven, Kuhn, Harald
Published in 2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (17.04.2023)
Published in 2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (17.04.2023)
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Conference Proceeding
Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride
Meinel, Katja, Stoeckel, Chris, Melzer, Marcel, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Otto, Thomas
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding
Investigations of Aluminum Nitride based piezoelectric MEMS
Stiebing, Martin, Tavakolibasti, Majid, Stoeckel, Chris, Hiller, Karla, Wunderle, Bernhard
Published in 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (01.05.2019)
Published in 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (01.05.2019)
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Conference Proceeding
Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array
Stoeckel, Chris, Melzer, Marcel, Meinel, Katja, Tavakolibasti, Majid, Forke, Roman, Zimmermann, Sven, Otto, Thomas, Kuhn, Harald
Published in 2021 Smart Systems Integration (SSI) (27.04.2021)
Published in 2021 Smart Systems Integration (SSI) (27.04.2021)
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Conference Proceeding
Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring
Hoffmann, Martin, Schmitt, Philip, Wittemeier, Steffen, Schaller, Falk, Shaporin, Alexey, Stockel, Chris, Geneis, Volker, Forke, Roman, Hedayat, Christian, Hilleringmann, Ulrich, Kuhn, Harald, Zimmermann, Sven
Published in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (15.01.2023)
Published in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (15.01.2023)
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Conference Proceeding