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Year of Publication 27.04.2016
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Year of Publication 07.07.2015
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MICROELECTROMECHANICAL SYSTEM DEVICE INCLUDING A METAL PROOF MASS AND A PIEZOELECTRIC COMPONENT
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Year of Publication 29.01.2014
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Year of Publication 29.01.2014
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Year of Publication 28.08.2013
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Year of Publication 01.07.2013
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Year of Publication 01.07.2013
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Year of Publication 01.07.2013
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