Single Crystalline GeSn on Silicon by Solid Phase Crystallization
Lieten, Ruben R., Decoster, Stefan, Menghini, Mariela, Seo, Jin Won, Vantomme, Andre, Locquet, Jean-Pierre
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
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Journal Article
Wet Cleaning of Molybdenum for Nano Interconnects
Le, Quoc-Toan, Guevenc, Haci, Ibrahim, Ansar, Klipp, Andreas, Decoster, Stefan, Murdoch, Gayle, Sanchez, Efrain Altamirano
Published in ECS transactions (20.05.2022)
Published in ECS transactions (20.05.2022)
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Journal Article
Enhanced Electrical Activation in In-Implanted Si0.35Ge0.65 by C Co-Doping
Ruixing Feng, Felipe Kremer, David J. Sprouster, Sahar Mirzaei, Stefan Decoster, Chris J. Glover, Scott A. Medling, John Lundsgaard Hansen, Arne Nylandsted-Larsen, Salvy P. Russo, Mark C. Ridgway
Published in Materials research letters (01.01.2017)
Published in Materials research letters (01.01.2017)
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Journal Article
Direct observation of the lattice sites of implanted manganese in silicon
da Silva, Daniel José, Wahl, Ulrich, Correia, João Guilherme, Amorim, Lígia Marina, Decoster, Stefan, da Silva, Manuel Ribeiro, Pereira, Lino Miguel da Costa, Araújo, João Pedro
Published in Applied physics. A, Materials science & processing (01.03.2016)
Published in Applied physics. A, Materials science & processing (01.03.2016)
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Journal Article
Emission channeling studies on transition-metal doped GaN and ZnO: Cation versus anion substitution
Pereira, L.M.C., Wahl, U., Correia, J.G., Amorim, L.M., Silva, D.J., Decoster, S., da Silva, M.R., Temst, K., Vantomme, A.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2014)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2014)
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Journal Article
Development of a Cu and W Compatible PERR Clean in BEOL Advanced Interconnect Patterning
Kesters, Els, Le, Quoc Toan, Decoster, Stefan, Vega Gonzalez, Victor, Holsteyns, Frank, De Gendt, Stefan
Published in ECS transactions (11.09.2015)
Published in ECS transactions (11.09.2015)
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Journal Article
Integration of Wet Cleaning in 45 Nm Pitch BEOL Processing
Kesters, Els, Le, Quoc Toan, Lazzarino, Frederic, Decoster, Stefan, Wilson, Chris, Simms, Ihsan, Holsteyns, Frank, De Gendt, Stefan
Published in ECS transactions (31.08.2013)
Published in ECS transactions (31.08.2013)
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Journal Article
Wet Cleaning of Molybdenum for Nano Interconnects
Le, Quoc-Toan, Guevenc, Haci, Ibrahim, Ansar, Klipp, Andreas, Decoster, Stefan, Murdoch, Gayle, Sanchez, Efrain Altamirano
Published in Meeting abstracts (Electrochemical Society) (07.07.2022)
Published in Meeting abstracts (Electrochemical Society) (07.07.2022)
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Journal Article
MP18-26 Ru Direct-Etch Integration Development with Leakage Improvement and Increased Aspect Ratio
Pokhrel, Ankit, Marti, Giulio, O'Toole, Martin, Murdoch, Gayle, Gupta, Anshul, Decoster, Stefan, Kundu, Souvik, Camerotto, Elisabeth, Le, Quoc Toan, Thiam, Arame, Lesniewska, Alicja, Park, Seongho, Tokei, Zsolt
Published in 2022 IEEE International Interconnect Technology Conference (IITC) (27.06.2022)
Published in 2022 IEEE International Interconnect Technology Conference (IITC) (27.06.2022)
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Conference Proceeding
Two-level Semi-damascene interconnect with fully self-aligned Vias at MP18
Marti, Giulio, Pokhrel, Ankit, Murdoch, Gayle, Delie, Gilles, Gupta, Anshul, Marien, Philippe, Lesniewska, Alicja, Decoster, Stefan, Kundu, Souvik, Le, Quoc Toan, Oniki, Yusuke, Kenens, Bart, Hermans, Yanick, Park, Seongho, Tokei, Zsolt
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
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Conference Proceeding