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Year of Publication 04.03.2024
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전자빔 오버레이를 위한 오버레이 마크 설계
GHINOVKER MARK, HAJAJ EITAN, STEELY CHRIS, EYRING STEFAN, FELER YOEL, STEELY TARSHISH INNA, POHLMANN ULRICH, GUTMAN NADAV, YOHANAN RAVIV, NAOT IRA
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Year of Publication 27.02.2024
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Composite overlay metrology target
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Year of Publication 07.11.2023
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Year of Publication 07.11.2023
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Overlay mark design for electron beam overlay
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Year of Publication 06.08.2024
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Year of Publication 06.08.2024
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Overlay mark design for electron beam overlay
Yohanan, Raviv, Naot, Ira, Hajaj, Eitan, Gutman, Nadav, Eyring, Stefan, Steely-Tarshish, Inna, Feler, Yoel, Ghinovker, Mark, Pohlmann, Ulrich, Steely, Chris
Year of Publication 02.01.2024
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Year of Publication 02.01.2024
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Performance Optimized Scanning Sequence for eBeam Metrology and Inspection
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Year of Publication 30.12.2021
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Year of Publication 30.12.2021
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Performance optimized scanning sequence for eBeam metrology and inspection
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Year of Publication 28.12.2021
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Year of Publication 28.12.2021
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OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Yohanan, Raviv, Naot, Ira, Hajaj, Eitan, Gutman, Nadav, Eyring, Stefan, Steely-Tarshish, Inna, Feler, Yoel, Ghinovker, Mark, Pohlmann, Ulrich, Steely, Chris
Year of Publication 12.10.2023
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Year of Publication 12.10.2023
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Overlay design for electron beam and scatterometry overlay measurements
Yohanan, Raviv, Naot, Ira, Hajaj, Eitan, Gutman, Nadav, Eyring, Stefan, Steely-Tarshish, Inna, Feler, Yoel, Ghinovker, Mark, Pohlmann, Ulrich, Steely, Chris
Year of Publication 08.08.2023
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Year of Publication 08.08.2023
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Overlay mark design for electron beam overlay
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Year of Publication 18.07.2023
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Year of Publication 18.07.2023
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OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
GHINOVKER, Mark, FELER, Yoel, HAJAJ, Eitan, YOHANAN, Raviv, NAOT, Ira, GUTMAN, Nadav, POHLMANN, Ulrich, EYRING, Stefan, STEELY, Chris, STEELY-TARSHISH, Inna
Year of Publication 05.01.2023
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Year of Publication 05.01.2023
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OVERLAY DESIGN FOR ELECTRON BEAM AND SCATTEROMETRY OVERLAY MEASUREMENTS
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Year of Publication 05.01.2023
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Year of Publication 05.01.2023
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OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
GHINOVKER, Mark, FELER, Yoel, HAJAJ, Eitan, YOHANAN, Raviv, NAOT, Ira, GUTMAN, Nadav, POHLMANN, Ulrich, EYRING, Stefan, STEELY, Chris, STEELY-TARSHISH, Inna
Year of Publication 05.01.2023
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Year of Publication 05.01.2023
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OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Yohanan, Raviv, Naot, Ira, Hajaj, Eitan, Gutman, Nadav, Eyring, Stefan, Steely-Tarshish, Inna, Feler, Yoel, Ghinovker, Mark, Pohlmann, Ulrich, Steely, Chris
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
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OVERLAY DESIGN FOR ELECTRON BEAM AND SCATTEROMETRY OVERLAY MEASUREMENTS
Yohanan, Raviv, Naot, Ira, Hajaj, Eitan, Gutman, Nadav, Eyring, Stefan, Steely-Tarshish, Inna, Feler, Yoel, Ghinovker, Mark, Pohlmann, Ulrich, Steely, Chris
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
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OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Yohanan, Raviv, Naot, Ira, Hajaj, Eitan, Gutman, Nadav, Eyring, Stefan, Steely-Tarshish, Inna, Feler, Yoel, Ghinovker, Mark, Pohlmann, Ulrich, Steely, Chris
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
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Overlay design for electron beam and scatterometry overlay measurements
STEELY-TARSHISH, INNA, STEELY, CHRIS, GUTMAN, NADAV, NAOT, IRA, EYRING, STEFAN, YOHANAN, RAVIV, POHLMANN, ULRICH, GHINOVKER, MARK, FELER, YOEL, HAJAJ, EITAN
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
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Overlay mark design for electron beam overlay
STEELY-TARSHISH, INNA, STEELY, CHRIS, GUTMAN, NADAV, NAOT, IRA, EYRING, STEFAN, YOHANAN, RAVIV, POHLMANN, ULRICH, GHINOVKER, MARK, FELER, YOEL, HAJAJ, EITAN
Year of Publication 16.01.2023
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Year of Publication 16.01.2023
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Overlay mark design for electron beam overlay
STEELY-TARSHISH, INNA, STEELY, CHRIS, GUTMAN, NADAV, NAOT, IRA, EYRING, STEFAN, YOHANAN, RAVIV, POHLMANN, ULRICH, GHINOVKER, MARK, FELER, YOEL, HAJAJ, EITAN
Year of Publication 16.01.2023
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Year of Publication 16.01.2023
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