Influence of laser annealing on SiO x films properties
Gavrylyuk, O O, Semchuk, OYu, Steblova, O V, Evtukh, A A, Fedorenko, L L, Bratus, O L, Zlobin, SO, Karlsteen, M
Published in Applied surface science (01.05.2015)
Published in Applied surface science (01.05.2015)
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Journal Article
Study of thermophysical properties of crystalline silicon and silicon-rich silicon oxide layers
Gavrylyuk, O.O., Semchyk, O.Yu, Bratus, O.L., Evtukh, A.A., Steblova, O.V., Fedorenko, L.L.
Published in Applied surface science (30.05.2014)
Published in Applied surface science (30.05.2014)
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Journal Article
Conference Proceeding
Influence of laser annealing on SiOx films properties
Gavrylyuk, O.O., Semchuk, O.Yu, Steblova, O.V., Evtukh, A.A., Fedorenko, L.L., Bratus, O.L., Zlobin, S.O., Karlsteen, M.
Published in Applied surface science (01.05.2015)
Published in Applied surface science (01.05.2015)
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Journal Article
Laser-Stimulated Phase Transformations in Thin Layers of SiO x and CN x –Ni
Fedorenko, L L, Prudnikov, A M, Evtukh, A A, A P Medvid’, Steblova, O V, Onufriev, P A, Korchovyi, A A, Uvarov, V S
Published in Materials science (New York, N.Y.) (01.11.2018)
Published in Materials science (New York, N.Y.) (01.11.2018)
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Journal Article