The inversion layer of subhalf-micrometer n- and p-channel MOSFET's in the temperature range 208-403 K
Wildau, H.-J., Bernt, H., Friedrich, D., Seifert, W., Staudt-Fischbach, P., Wagemann, H.G., Windbracke, W.
Published in IEEE transactions on electron devices (01.12.1993)
Published in IEEE transactions on electron devices (01.12.1993)
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Journal Article
Simulation assisted design of processes for gray-tone lithography
Henke, W., Hoppe, W., Quenzer, H.J., Staudt-Fischbach, P., Wagner, B.
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Journal Article
Conference Proceeding
Complete x-ray lithography processing of an 8-level 0.4 micron CMOS test device
Staudt-Fischbach, P., Windbracke, W., Bernt, H., Zwicker, G., Friedrich, D., Schliwinski, H.-J., Lange, P., Hemicker, P., Huber, H.-L., Scheunemann, U., Simon, K.
Published in Microelectronic engineering (01.03.1992)
Published in Microelectronic engineering (01.03.1992)
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Journal Article
Correlation between mobility degradation and threshold-voltage behavior of subhalf-micron MOSFETs
Wildau, H.-J., Bernt, H., Friedrich, D., Seifert, W., Staudt-Fischbach, P., Wagemann, H.G., Windbracke, W.
Published in ESSDERC '92: 22nd European Solid State Device Research conference (1992)
Published in ESSDERC '92: 22nd European Solid State Device Research conference (1992)
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Journal Article
Conference Proceeding
Selective Tungsten Metallization for 0.5 μm MOS Processes
Friedrich, D., Staudt-Fischbach, P., Wagenaar, D., Windbracke, W.
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
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Conference Proceeding
Field Isolation Using Shallow Trenches for Submicron CMOS Technology
Zwicker, G., Lange, P., Staudt-Fischbach, P., Windbracke, W.
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
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Conference Proceeding
Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces
Henke, W., Hoppe, W., Quenzer, H.J., Staudt-Fischbach, P., Wagner, B.
Published in Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems (1994)
Published in Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems (1994)
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Conference Proceeding