Comparative study of the MeV ion channeling implantation induced damage in 6H-SiC by the iterative procedure and phenomenological CSIM computer code
Gloginjic, Marko, Erich, Marko, Mravik, Zeljko, Vrban, Branislav, Cerba, Stefan, Lüley, Jakub, Filová, Vendula, Katovský, Karel, Stastný, Ondej, Burian, Jiri, Petrovic, Srdjan
Published in Nuclear technology & radiation protection (2022)
Published in Nuclear technology & radiation protection (2022)
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