Fast extraction of defect size distribution using a single layer short flow NEST structure
Hess, C., Stashower, D., Stine, B.E., Weiland, L.H., Verma, G., Miyamoto, K., Inoue, K.
Published in IEEE transactions on semiconductor manufacturing (01.11.2001)
Published in IEEE transactions on semiconductor manufacturing (01.11.2001)
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Journal Article
Conference Proceeding
Fast extraction of killer defect density and size distribution using a single layer short flow NEST structure
Hess, C., Stashower, D., Stine, B.E., Verna, G., Weiland, L.H., Miyamoto, K., Inoue, K.
Published in ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) (2000)
Published in ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) (2000)
Get full text
Conference Proceeding