Metalorganic vapour-phase epitaxy of AlGaN/GaN heterostructures on chlorine plasma etched GaN templates without buried conductive layer
Wośko, Mateusz, Paszkiewicz, Bogdan, Stafiniak, Andrzej, Prażmowska-Czajka, Joanna, Vincze, Andrej, Indykiewicz, Kornelia, Stępniak, Michał, Kaczmarczyk, Bartosz, Paszkiewicz, Regina
Published in Materials science in semiconductor processing (01.03.2020)
Published in Materials science in semiconductor processing (01.03.2020)
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Journal Article
Growth Uniformity in Selective Area Epitaxy of AlGaN/GaN Heterostructures for the Application in Semiconductor Devices
Stępniak, Michał, Wośko, Mateusz, Prażmowska-Czajka, Joanna, Stafiniak, Andrzej, Przybylski, Dariusz, Paszkiewicz, Regina
Published in Electronics (Basel) (01.12.2020)
Published in Electronics (Basel) (01.12.2020)
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Journal Article