Optimizing High-Product-Mix Manufacturing with Advanced Process Control through Machine Learning-Based Virtual Metrology
Lee, Hyung Joo, Choi, Sanghyun, Greeneltch, Nathan, Jayaram, Srividya
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
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Conference Proceeding
Knowledge Transfer. From Electronic Design Automation to Advanced Process Manufacturing
Torres, J. Andres, Tao, Melody, Doinychko, Anastasiia, Govindaraj, Mohan, Jayaram, Srividya, Greeneltch, Nathan
Published in 2024 IEEE 67th International Midwest Symposium on Circuits and Systems (MWSCAS) (11.08.2024)
Published in 2024 IEEE 67th International Midwest Symposium on Circuits and Systems (MWSCAS) (11.08.2024)
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Conference Proceeding
Effective Downsampling Techniques for SEM Defect Inspection Using Design Insights in Machine Learning: Topic/category: DI: Defect Inspection and Reduction
Xie, Qian, Viswanatha, S Keerthibala, Jayaram, Srividya, Krishnankutty, Sudheesh, Huguennet, Frederic, Soni, Rakesh, Basu, Aparna
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
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Conference Proceeding
Machine Learning Based SEM Image Analysis for Automatic Detection and Classification of Wafer Defects
Choi, Sanghyun, Xie, Qian, Greeneltch, Nathan, Lee, Hyung Joo, Govindaraj, Mohan, Jayaram, Srividya, Pereira, Mark, Biswas, Sayani, Bhamidipati, Samir, Torunoglu, Ilhami
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
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Conference Proceeding
Automotive Process Reliability Prediction for 5,7nm using ML
Jayaram, Srividya, Lee, Hyung Joo, Kim, Dongin, Choi, Sanghyun, Hong, Seungpyo, Lee, Seungjae, Kwak, Doohwan, Paek, Seungwon, Kwon, Minho, Kim, Yeongdo, Jung, Hyobe, Kissiov, Ivan, Torres, Andres, Greeneltch, Nathan, Tao, Melody, Lee, Ho
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
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Conference Proceeding
Cobertura de vacunación contra el Covid-19 y contagios en zonas urbanas barrios marginales de Bangalore, India: un estudio transversal
Sunil Kumar, Dodderi, Apoorva E., Patel, Srividya, Jayaram, Vidya, Ramesh
Published in European journal of health research (19.04.2022)
Published in European journal of health research (19.04.2022)
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Journal Article
A.I. Driven Process Control by Machine Learning Based Virtual Metrology for High Product Mix Manufacturing
Lee, Hyung Joo, Choi, Sanghyun, Greeneltch, Nathan, Jayaram, Srividya, Zhang, Shiwei, Wan, Qijian, Du, Chunshan
Published in 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) (17.03.2024)
Published in 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) (17.03.2024)
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Conference Proceeding
Enabling process control though predictive design and virtual metrology for high product mix manufacturing
Lee, Hyung Joo, Choi, Sanghyun, Krishnankutty, Sudheesh, Botta, Raghavendra, Greeneltch, Nathan, Jayaram, Srividya
Published in 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (03.03.2024)
Published in 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (03.03.2024)
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Conference Proceeding
Reliability Prediction for Automotive 5nm and 7nm Technology node by using Machine Learning based Solution
Lee, Hyung Joo, Kim, Dongin, Choi, Sanghyun, Hong, Seungpyo, Kwak, Doohwan, Jayaram, Srividya, Paek, Seungwon, Kwon, Minho, Kim, Yeongdo, Jung, Hyobe, Kissiov, Ivan, Tao, Melody, Torres, Andres, Greeneltch, Nathan, Lee, Ho
Published in 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (07.03.2023)
Published in 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (07.03.2023)
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Conference Proceeding