A fluid handling structure and a lithographic apparatus
ROPS CORNELIUS MARIA, OLIESLAGERS RUUD, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, MELMAN JOHANNES CORNELIS PAULUS, GATTOBIGIO GIOVANNI LUCA, LEMPENS HAN HENRICUS ALDEGONDA, POLET THEODORUS WILHELMUS, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, YU MIAO, ULUCAN ARTUNC
Year of Publication 11.04.2023
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Year of Publication 11.04.2023
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FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
RUUD OLIESLAGERS, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, THEODORUS WILHELMUS POLET, CORNELIUS MARIA ROPS, JOHANNES CORNELIS PAULUS MELMAN, LEMPENS HAN HENRICUS ALDEGONDA, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, GIOVANNI LUCA GATTOBIGIO, YU MIAO, ARTUNC ULUCAN
Year of Publication 06.01.2022
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Year of Publication 06.01.2022
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A fluid handling structure and a lithographic apparatus
ROPS CORNELIUS MARIA, OLIESLAGERS RUUD, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, MELMAN JOHANNES CORNELIS PAULUS, GATTOBIGIO GIOVANNI LUCA, LEMPENS HAN HENRICUS ALDEGONDA, POLET THEODORUS WILHELMUS, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, YU MIAO, ULUCAN ARTUNC
Year of Publication 10.09.2020
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Year of Publication 10.09.2020
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FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
RUUD OLIESLAGERS, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, THEODORUS WILHELMUS POLET, CORNELIUS MARIA ROPS, JOHANNES CORNELIS PAULUS MELMAN, LEMPENS HAN HENRICUS ALDEGONDA, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, GIOVANNI LUCA GATTOBIGIO, YU MIAO, ARTUNC ULUCAN
Year of Publication 05.03.2020
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Year of Publication 05.03.2020
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유체 핸들링 구조체 및 리소그래피 장치
ROPS CORNELIUS MARIA, OLIESLAGERS RUUD, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, MELMAN JOHANNES CORNELIS PAULUS, GATTOBIGIO GIOVANNI LUCA, LEMPENS HAN HENRICUS ALDEGONDA, POLET THEODORUS WILHELMUS, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, YU MIAO, ULUCAN ARTUNC
Year of Publication 11.09.2018
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Year of Publication 11.09.2018
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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Year of Publication 07.09.2010
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Year of Publication 07.09.2010
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Fluid handling structure and lithographic apparatus
Eummelen, Erik Henricus Egidius Catharina, Melman, Johannes Cornelis Paulus, Lempens, Han Henricus Aldegonda, Olieslagers, Ruud, Rops, Cornelius Maria, Yu, Miao, Polet, Theodorus Wilhelmus, Ulucan, Artunç, Spruytenburg, Patrick Johannes Wilhelmus, Gattobigio, Giovanni Luca
Year of Publication 28.03.2023
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Year of Publication 28.03.2023
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FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
Eummelen, Erik Henricus Egidius Catharina, Melman, Johannes Cornelis Paulus, Lempens, Han Henricus Aldegonda, Olieslagers, Ruud, Rops, Cornelius Maria, Yu, Miao, Polet, Theodorus Wilhelmus, Ulucan, Artunç, Spruytenburg, Patrick Johannes Wilhelmus, Gattobigio, Giovanni Luca
Year of Publication 05.05.2022
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Year of Publication 05.05.2022
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Fluid handling structure and lithographic apparatus
Eummelen, Erik Henricus Egidius Catharina, Melman, Johannes Cornelis Paulus, Lempens, Han Henricus Aldegonda, Olieslagers, Ruud, Rops, Cornelius Maria, Yu, Miao, Polet, Theodorus Wilhelmus, Ulucan, Artunç, Spruytenburg, Patrick Johannes Wilhelmus, Gattobigio, Giovanni Luca
Year of Publication 25.01.2022
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Year of Publication 25.01.2022
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FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
LEMPENS, Han Henricus Aldegonda, ULUCAN, Artunç, POLET, Theodorus Wilhelmus, GATTOBIGIO, Giovanni Luca, OLIESLAGERS, Ruud, MELMAN, Johannes Cornelis Paulus, YU, Miao, Wilhelmus SPRUYTENBURG, Patrick Johannes, EUMMELEN, Erik Henricus Egidius Catharina, ROPS, Cornelius Maria
Year of Publication 17.06.2021
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Year of Publication 17.06.2021
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Fluid handling structure and lithographic apparatus
Eummelen, Erik Henricus Egidius Catharina, Melman, Johannes Cornelis Paulus, Lempens, Han Henricus Aldegonda, Olieslagers, Ruud, Rops, Cornelius Maria, Yu, Miao, Polet, Theodorus Wilhelmus, Ulucan, Artunç, Spruytenburg, Patrick Johannes Wilhelmus, Gattobigio, Giovanni Luca
Year of Publication 06.04.2021
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Year of Publication 06.04.2021
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FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
LEMPENS, Han Henricus Aldegonda, POLET, Theodorus Wilhelmus, ULUCAN, Arturnç, GATTOBIGIO, Giovanni Luca, OLIESLAGERS, Ruud, MELMAN, Johannes Cornelis Paulus, YU, Miao, SPRUYTENBURG, Patrick Johannes Wilhelmus, EUMMELEN, Erik Henricus Egidius Catharina, ROPS, Cornelius Maria
Year of Publication 02.01.2020
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Year of Publication 02.01.2020
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Fluid handling structure and lithographic apparatus
Eummelen, Erik Henricus Egidius Catharina, Melman, Johannes Cornelis Paulus, Lempens, Han Henricus Aldegonda, Olieslagers, Ruud, Rops, Cornelius Maria, Yu, Miao, Polet, Theodorus Wilhelmus, Ulucan, Artunç, Spruytenburg, Patrick Johannes Wilhelmus, Gattobigio, Giovanni Luca
Year of Publication 17.09.2019
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Year of Publication 17.09.2019
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FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
LEMPENS, Han Henricus Aldegonda, ULUCAN, Artunç, POLET, Theodorus Wilhelmus, GATTOBIGIO, Giovanni Luca, OLIESLAGERS, Ruud, MELMAN, Johannes Cornelis Paulus, YU, Miao, SPRUYTENBURG, Patrick Johannes Wilhelmus, EUMMELEN, Erik Henricus Egidius Catharina, ROPS, Cornelius Maria
Year of Publication 03.01.2019
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Year of Publication 03.01.2019
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Year of Publication 23.04.2019
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Year of Publication 23.04.2019
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A FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
PATRICK JOHANNES WILHELMUS SPRUYTENBURG, RUUD OLIESLAGERS, MIAO YU, THEODORUS WILHELMUS POLET, CORNELIUS MARIA ROPS, JOHANNES CORNELIS PAULUS MELMAN, ERIK HENRICUS EGIDIUS CATHARINA EUMMELEN, GIOVANNI LUCA GATTOBIGIO, HAN HENRICUS ALDEGONDA LEMPENS, ARTUNÇ ULUCAN
Year of Publication 21.07.2017
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Year of Publication 21.07.2017
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FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
ULUCAN, Artunç, OLIESLAGERS, Ruud, SPRUYTENBURG, Patrick, Johannes, Wilhelmus, EUMMELEN, Erik, Henricus, Egidius, Catharina, YU, Miao, POLET, Theodorus, Wilhelmus, GATTOBIGIO, Giovanni, Luca, ROPS, Cornelius, Maria, LEMPENS, Han, Henricus, Aldegonda, MELMAN, Johannes, Cornelis, Paulus
Year of Publication 20.07.2017
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Year of Publication 20.07.2017
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
LIEBREGTS Paulus Martinus Maria, DIRECKS Daniël Jozef Maria, VERSTRAETE Joris Johan Anne-Marie, VAN LIEROP Mathieus Anna Karel, MIRANDA Marcio Alexandre Cano, HOOGENDAM Christiaan Alexander, SPRUYTENBURG Patrick Johannes Wilhelmus, BERKVENS Paul Petrus Joannes, RIEPEN Michel, MONDT Eva, DE METSENAERE Christophe, VAN DER HAM Ronald, STEFFENS Koen, LEMPENS Han Henricus Aldegonda, JANSSEN Franciscus Johannes Joseph, BRANDS Gert-Jan Gerardus Johannes Thomas, SIMONS Wilhelmus Franciscus Johannes
Year of Publication 24.08.2017
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Year of Publication 24.08.2017
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FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
ROPS CORNELIUS MARIA, OLIESLAGERS RUUD, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, MELMAN JOHANNES CORNELIS PAULUS, GATTOBIGIO GIOVANNI LUCA, LEMPENS HAN HENRICUS ALDEGONDA, POLET THEODORUS WILHELMUS, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, YU MIAO, ULUCAN ARTUNC
Year of Publication 03.08.2021
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Year of Publication 03.08.2021
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A fluid handling structure and lithographic apparatus
SPRUYTENBURG, PATRICK JOHANNES WILHELMUS, OLIESLAGERS, RUUD, MELMAN, JOHANNES CORNELIS PAULUS, YU, MIAO, LEMPENS, HAN HENRICUS ALDEGONDA, ULUCAN, ARTUNC, GATTOBIGIO, GIOVANNI LUCA, ROPS, CORNELIUS MARIA, POLET, THEODORUS WILHELMUS, EUMMELEN, ERIK HENRICUS EGIDIUS CATHARINA
Year of Publication 11.07.2021
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Year of Publication 11.07.2021
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