Investigation of total reflection X-ray fluorescence calibration with picoliter deposition arrays
Sparks, Chris M., Fittschen, Ursula E.A., Havrilla, George J.
Published in Microelectronic engineering (01.02.2013)
Published in Microelectronic engineering (01.02.2013)
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Journal Article
Conference Proceeding
Automated nanoliter solution deposition for total reflection X-ray fluorescence analysis of semiconductor samples
Sparks, Chris M., Gondran, Carolyn H., Havrilla, George J., Hastings, Elizabeth P.
Published in Spectrochimica acta. Part B: Atomic spectroscopy (01.11.2006)
Published in Spectrochimica acta. Part B: Atomic spectroscopy (01.11.2006)
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Journal Article
Characterization of high- k gate dielectric and metal gate electrode semiconductor samples with a total reflection X-ray fluorescence spectrometer
Sparks, Chris M., Beebe, Meredith R., Bennett, Joe, Foran, Brendan, Gondran, Carolyn, Hou, Alex
Published in Spectrochimica acta. Part B: Atomic spectroscopy (31.08.2004)
Published in Spectrochimica acta. Part B: Atomic spectroscopy (31.08.2004)
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Journal Article