Pt thermal atomic layer deposition for silicon x-ray micropore optics
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Published in Applied optics. Optical technology and biomedical optics (20.04.2018)
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Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
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Published in Applied physics express (01.08.2020)
Published in Applied physics express (01.08.2020)
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Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Van Meter, Kylie E., Chowdhury, Md Istiaque, Sowa, Mark J., Kozen, Alexander C., Grejtak, Tomas, Babuska, Tomas F., Strandwitz, Nicholas C., Krick, Brandon A.
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Published in Wear (15.06.2023)
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Journal Article
Plasma-enhanced atomic layer deposition of titanium vanadium nitride
Sowa, Mark J., Ju, Ling, Kozen, Alexander C., Strandwitz, Nicholas C., Zeng, Guosong, Babuska, Tomas F., Hsain, Zakaria, Krick, Brandon A.
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.11.2018)
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.11.2018)
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Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
Deguns, Eric, Sowa, Mark J., Dalberth, Mark J., Bhatia, Ritwik, Kanjolia, Ravi, Moser, Dan, Sundaram, Ganesh M., Becker, Jill S.
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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(Invited) Large Format Atomic Layer Deposition
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Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Thin films for 3D: ALD for non-planar topographies
Sundaram, Ganesh M, Deguns, Eric W, Bhatia, Ritwik, Dalberth, Mark J, Sowa, Mark, Becker, Jill S
Published in Solid state technology (01.06.2009)
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Published in Solid state technology (01.06.2009)
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